4/7/2010	8:48:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/7/2010	8:48:27 AM	Recipe started at 8:48 AM
4/7/2010	8:48:27 AM	Helium valve closed
4/7/2010	8:48:27 AM	H2 valve closed
4/7/2010	8:48:27 AM	BCl3 valve closed
4/7/2010	8:48:27 AM	PH3 valve closed
4/7/2010	8:48:27 AM	SiCl4 pre valve closed
4/7/2010	8:48:27 AM	SiCl4 post valve closed
4/7/2010	8:48:27 AM	Main Vac valve closed
4/7/2010	8:48:27 AM	Bypass valve closed
4/7/2010	8:48:27 AM	Bubbler valve closed
4/7/2010	8:48:27 AM	Helium MFC set to  0.000000
4/7/2010	8:48:27 AM	H2 MFC set to  0.000000
4/7/2010	8:48:27 AM	BCl3 MFC set to  0.000000
4/7/2010	8:48:27 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:48:27 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:48:27 AM	Tube furnace set to 0
4/7/2010	8:48:28 AM	Run finished at 8:48 AM
4/7/2010	8:48:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/7/2010	8:48:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	8:48:41 AM	Recipe started at 8:48 AM
4/7/2010	8:48:41 AM	H2 valve closed
4/7/2010	8:48:41 AM	BCl3 valve closed
4/7/2010	8:48:41 AM	PH3 valve closed
4/7/2010	8:48:41 AM	SiCl4 pre valve closed
4/7/2010	8:48:41 AM	SiCl4 post valve closed
4/7/2010	8:48:41 AM	Main Vac valve closed
4/7/2010	8:48:41 AM	Bypass valve closed
4/7/2010	8:48:41 AM	Bubbler valve closed
4/7/2010	8:48:41 AM	Helium valve opened
4/7/2010	8:48:41 AM	Helium MFC set to  500.000000
4/7/2010	8:48:41 AM	H2 MFC set to  0.000000
4/7/2010	8:48:41 AM	BCl3 MFC set to  0.000000
4/7/2010	8:48:41 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:48:41 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:48:41 AM	Tube furnace set to 0
4/7/2010	8:50:00 AM	Helium valve closed
4/7/2010	8:50:00 AM	H2 valve closed
4/7/2010	8:50:00 AM	BCl3 valve closed
4/7/2010	8:50:00 AM	PH3 valve closed
4/7/2010	8:50:00 AM	SiCl4 pre valve closed
4/7/2010	8:50:00 AM	SiCl4 post valve closed
4/7/2010	8:50:00 AM	Main Vac valve closed
4/7/2010	8:50:00 AM	Bypass valve closed
4/7/2010	8:50:00 AM	Bubbler valve closed
4/7/2010	8:50:00 AM	Helium MFC set to  0.000000
4/7/2010	8:50:00 AM	H2 MFC set to  0.000000
4/7/2010	8:50:00 AM	BCl3 MFC set to  0.000000
4/7/2010	8:50:00 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:50:00 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:50:00 AM	Tube furnace set to 0
4/7/2010	8:50:01 AM	Run finished at 8:50 AM
4/7/2010	8:50:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	8:50:19 AM	H2 MFC set to  0.000000
4/7/2010	8:50:24 AM	Helium MFC set to  200.000000
4/7/2010	8:50:29 AM	Helium valve opened
4/7/2010	8:50:33 AM	Bubbler valve opened
4/7/2010	8:51:04 AM	SiCl4 MFC set to  200.000000
4/7/2010	8:51:10 AM	SiCl4 pre valve opened
4/7/2010	8:51:11 AM	SiCl4 post valve opened
4/7/2010	8:51:17 AM	Helium valve closed
4/7/2010	8:51:34 AM	Helium valve opened
4/7/2010	8:51:36 AM	SiCl4 pre valve closed
4/7/2010	8:51:36 AM	SiCl4 post valve closed
4/7/2010	8:51:41 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:52:08 AM	Bubbler valve closed
4/7/2010	8:52:08 AM	Helium valve closed
4/7/2010	8:52:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	8:52:10 AM	Recipe started at 8:52 AM
4/7/2010	8:52:10 AM	Helium valve closed
4/7/2010	8:52:10 AM	H2 valve closed
4/7/2010	8:52:10 AM	BCl3 valve closed
4/7/2010	8:52:10 AM	PH3 valve closed
4/7/2010	8:52:10 AM	SiCl4 pre valve closed
4/7/2010	8:52:10 AM	SiCl4 post valve closed
4/7/2010	8:52:10 AM	Main Vac valve closed
4/7/2010	8:52:10 AM	Bubbler valve closed
4/7/2010	8:52:10 AM	Bypass valve opened
4/7/2010	8:52:10 AM	Helium MFC set to  0.000000
4/7/2010	8:52:10 AM	H2 MFC set to  0.000000
4/7/2010	8:52:10 AM	BCl3 MFC set to  0.000000
4/7/2010	8:52:10 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:52:10 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:52:10 AM	Tube furnace set to 0
4/7/2010	8:52:37 AM	Helium valve closed
4/7/2010	8:52:37 AM	H2 valve closed
4/7/2010	8:52:37 AM	BCl3 valve closed
4/7/2010	8:52:37 AM	PH3 valve closed
4/7/2010	8:52:37 AM	SiCl4 pre valve closed
4/7/2010	8:52:37 AM	SiCl4 post valve closed
4/7/2010	8:52:37 AM	Bubbler valve closed
4/7/2010	8:52:37 AM	Main Vac valve opened
4/7/2010	8:52:37 AM	Bypass valve opened
4/7/2010	8:52:37 AM	Helium MFC set to  0.000000
4/7/2010	8:52:37 AM	H2 MFC set to  0.000000
4/7/2010	8:52:37 AM	BCl3 MFC set to  0.000000
4/7/2010	8:52:37 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:52:37 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:52:37 AM	Tube furnace set to 0
4/7/2010	8:52:37 AM	Run finished at 8:52 AM
4/7/2010	8:52:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	8:55:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	8:55:35 AM	Recipe started at 8:55 AM
4/7/2010	8:55:35 AM	H2 valve closed
4/7/2010	8:55:35 AM	BCl3 valve closed
4/7/2010	8:55:35 AM	PH3 valve closed
4/7/2010	8:55:35 AM	SiCl4 pre valve closed
4/7/2010	8:55:35 AM	SiCl4 post valve closed
4/7/2010	8:55:35 AM	Main Vac valve closed
4/7/2010	8:55:35 AM	Bypass valve closed
4/7/2010	8:55:35 AM	Bubbler valve closed
4/7/2010	8:55:35 AM	Helium valve opened
4/7/2010	8:55:35 AM	Helium MFC set to  500.000000
4/7/2010	8:55:35 AM	H2 MFC set to  0.000000
4/7/2010	8:55:35 AM	BCl3 MFC set to  0.000000
4/7/2010	8:55:35 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:55:35 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:55:36 AM	Tube furnace set to 0
4/7/2010	8:56:56 AM	Helium valve closed
4/7/2010	8:56:56 AM	H2 valve closed
4/7/2010	8:56:56 AM	BCl3 valve closed
4/7/2010	8:56:56 AM	PH3 valve closed
4/7/2010	8:56:56 AM	SiCl4 pre valve closed
4/7/2010	8:56:56 AM	SiCl4 post valve closed
4/7/2010	8:56:56 AM	Main Vac valve closed
4/7/2010	8:56:56 AM	Bypass valve closed
4/7/2010	8:56:56 AM	Bubbler valve closed
4/7/2010	8:56:56 AM	Helium MFC set to  0.000000
4/7/2010	8:56:56 AM	H2 MFC set to  0.000000
4/7/2010	8:56:56 AM	BCl3 MFC set to  0.000000
4/7/2010	8:56:56 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:56:56 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:56:56 AM	Tube furnace set to 0
4/7/2010	8:56:57 AM	Run finished at 8:56 AM
4/7/2010	8:56:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	8:57:15 AM	SiCl4 MFC set to  50.000000
4/7/2010	8:57:21 AM	Helium MFC set to  200.000000
4/7/2010	8:57:23 AM	Helium valve opened
4/7/2010	8:57:26 AM	Bubbler valve opened
4/7/2010	8:57:40 AM	Helium MFC set to  300.000000
4/7/2010	8:57:49 AM	SiCl4 pre valve opened
4/7/2010	8:57:49 AM	SiCl4 post valve opened
4/7/2010	8:58:06 AM	SiCl4 MFC set to  100.000000
4/7/2010	8:58:21 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:58:22 AM	SiCl4 pre valve closed
4/7/2010	8:58:23 AM	SiCl4 post valve closed
4/7/2010	8:59:10 AM	Bubbler valve closed
4/7/2010	8:59:11 AM	Helium valve closed
4/7/2010	8:59:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	8:59:56 AM	Recipe started at 8:59 AM
4/7/2010	8:59:56 AM	Helium valve closed
4/7/2010	8:59:56 AM	H2 valve closed
4/7/2010	8:59:56 AM	BCl3 valve closed
4/7/2010	8:59:56 AM	PH3 valve closed
4/7/2010	8:59:56 AM	SiCl4 pre valve closed
4/7/2010	8:59:56 AM	SiCl4 post valve closed
4/7/2010	8:59:56 AM	Main Vac valve closed
4/7/2010	8:59:56 AM	Bubbler valve closed
4/7/2010	8:59:57 AM	Bypass valve opened
4/7/2010	8:59:57 AM	Helium MFC set to  0.000000
4/7/2010	8:59:57 AM	H2 MFC set to  0.000000
4/7/2010	8:59:57 AM	BCl3 MFC set to  0.000000
4/7/2010	8:59:57 AM	SiCl4 MFC set to  0.000000
4/7/2010	8:59:57 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	8:59:57 AM	Tube furnace set to 0
4/7/2010	9:00:21 AM	Helium valve closed
4/7/2010	9:00:21 AM	H2 valve closed
4/7/2010	9:00:21 AM	BCl3 valve closed
4/7/2010	9:00:21 AM	PH3 valve closed
4/7/2010	9:00:21 AM	SiCl4 pre valve closed
4/7/2010	9:00:21 AM	SiCl4 post valve closed
4/7/2010	9:00:21 AM	Bubbler valve closed
4/7/2010	9:00:21 AM	Main Vac valve opened
4/7/2010	9:00:21 AM	Bypass valve opened
4/7/2010	9:00:21 AM	Helium MFC set to  0.000000
4/7/2010	9:00:21 AM	H2 MFC set to  0.000000
4/7/2010	9:00:21 AM	BCl3 MFC set to  0.000000
4/7/2010	9:00:21 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:00:21 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	9:00:21 AM	Tube furnace set to 0
4/7/2010	9:00:21 AM	Run finished at 9:00 AM
4/7/2010	9:00:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	9:01:13 AM	Recipe started at 9:01 AM
4/7/2010	9:01:13 AM	Helium valve closed
4/7/2010	9:01:13 AM	BCl3 valve closed
4/7/2010	9:01:13 AM	PH3 valve closed
4/7/2010	9:01:13 AM	SiCl4 pre valve closed
4/7/2010	9:01:13 AM	SiCl4 post valve closed
4/7/2010	9:01:13 AM	Main Vac valve closed
4/7/2010	9:01:13 AM	Bypass valve closed
4/7/2010	9:01:13 AM	Bubbler valve closed
4/7/2010	9:01:13 AM	H2 valve opened
4/7/2010	9:01:13 AM	Helium MFC set to  0.000000
4/7/2010	9:01:13 AM	H2 MFC set to  500.000000
4/7/2010	9:01:13 AM	BCl3 MFC set to  0.000000
4/7/2010	9:01:13 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:01:13 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	9:01:13 AM	Tube furnace set to 0
4/7/2010	9:02:01 AM	Run aborted at 9:02 AM
4/7/2010	9:02:01 AM	Helium valve closed
4/7/2010	9:02:01 AM	H2 valve closed
4/7/2010	9:02:01 AM	BCl3 valve closed
4/7/2010	9:02:01 AM	PH3 valve closed
4/7/2010	9:02:01 AM	SiCl4 pre valve closed
4/7/2010	9:02:01 AM	SiCl4 post valve closed
4/7/2010	9:02:01 AM	Bypass valve closed
4/7/2010	9:02:01 AM	Main Vac valve closed
4/7/2010	9:02:01 AM	Bubbler valve closed
4/7/2010	9:02:01 AM	Helium MFC set to  0.000000
4/7/2010	9:02:01 AM	H2 MFC set to  0.000000
4/7/2010	9:02:01 AM	BCl3 MFC set to  0.000000
4/7/2010	9:02:01 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:02:01 AM	Tube furnace set to 0
4/7/2010	9:02:24 AM	Recipe started at 9:02 AM
4/7/2010	9:02:24 AM	Helium valve closed
4/7/2010	9:02:24 AM	BCl3 valve closed
4/7/2010	9:02:24 AM	PH3 valve closed
4/7/2010	9:02:24 AM	SiCl4 pre valve closed
4/7/2010	9:02:24 AM	SiCl4 post valve closed
4/7/2010	9:02:24 AM	Main Vac valve closed
4/7/2010	9:02:24 AM	Bypass valve closed
4/7/2010	9:02:24 AM	Bubbler valve closed
4/7/2010	9:02:24 AM	H2 valve opened
4/7/2010	9:02:25 AM	Helium MFC set to  0.000000
4/7/2010	9:02:25 AM	H2 MFC set to  500.000000
4/7/2010	9:02:25 AM	BCl3 MFC set to  0.000000
4/7/2010	9:02:25 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:02:25 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	9:02:25 AM	Tube furnace set to 0
4/7/2010	9:02:59 AM	Helium valve closed
4/7/2010	9:02:59 AM	BCl3 valve closed
4/7/2010	9:02:59 AM	PH3 valve closed
4/7/2010	9:02:59 AM	SiCl4 pre valve closed
4/7/2010	9:02:59 AM	SiCl4 post valve closed
4/7/2010	9:02:59 AM	Main Vac valve closed
4/7/2010	9:02:59 AM	Bypass valve closed
4/7/2010	9:02:59 AM	H2 valve opened
4/7/2010	9:02:59 AM	Bubbler valve opened
4/7/2010	9:02:59 AM	Helium MFC set to  0.000000
4/7/2010	9:02:59 AM	H2 MFC set to  500.000000
4/7/2010	9:02:59 AM	BCl3 MFC set to  0.000000
4/7/2010	9:02:59 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:02:59 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	9:03:00 AM	Tube furnace set to 1000
4/7/2010	9:20:59 AM	Helium valve closed
4/7/2010	9:20:59 AM	BCl3 valve closed
4/7/2010	9:20:59 AM	PH3 valve closed
4/7/2010	9:20:59 AM	Main Vac valve closed
4/7/2010	9:20:59 AM	Bypass valve closed
4/7/2010	9:20:59 AM	H2 valve opened
4/7/2010	9:20:59 AM	SiCl4 pre valve opened
4/7/2010	9:20:59 AM	SiCl4 post valve opened
4/7/2010	9:20:59 AM	Bubbler valve opened
4/7/2010	9:20:59 AM	Helium MFC set to  0.000000
4/7/2010	9:20:59 AM	H2 MFC set to  500.000000
4/7/2010	9:20:59 AM	BCl3 MFC set to  0.000000
4/7/2010	9:20:59 AM	SiCl4 MFC set to  90.000000
4/7/2010	9:20:59 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	9:20:59 AM	Tube furnace set to 1000
4/7/2010	9:27:16 AM	Helium valve closed
4/7/2010	9:27:16 AM	H2 valve closed
4/7/2010	9:27:16 AM	BCl3 valve closed
4/7/2010	9:27:16 AM	PH3 valve closed
4/7/2010	9:27:16 AM	SiCl4 pre valve closed
4/7/2010	9:27:16 AM	SiCl4 post valve closed
4/7/2010	9:27:16 AM	Main Vac valve closed
4/7/2010	9:27:16 AM	Bubbler valve closed
4/7/2010	9:27:16 AM	Bypass valve opened
4/7/2010	9:27:16 AM	Helium MFC set to  0.000000
4/7/2010	9:27:16 AM	H2 MFC set to  0.000000
4/7/2010	9:27:16 AM	BCl3 MFC set to  0.000000
4/7/2010	9:27:16 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:27:16 AM	Bypass solenoid MFC set to  760.000000
4/7/2010	9:27:17 AM	Tube furnace set to 0
4/7/2010	9:27:17 AM	Baratron reads 900.567492 Torr.  Emergency exit.
4/7/2010	9:34:00 AM	Run aborted at 9:34 AM
4/7/2010	9:38:47 AM	Program exited cleanly
4/7/2010	9:38:48 AM	Program started normally
4/7/2010	9:38:48 AM	Helium valve closed
4/7/2010	9:38:48 AM	H2 valve closed
4/7/2010	9:38:48 AM	BCl3 valve closed
4/7/2010	9:38:48 AM	PH3 valve closed
4/7/2010	9:38:48 AM	SiCl4 pre valve closed
4/7/2010	9:38:48 AM	SiCl4 post valve closed
4/7/2010	9:38:48 AM	Main Vac valve closed
4/7/2010	9:38:48 AM	Bypass valve closed
4/7/2010	9:38:48 AM	Bubbler valve closed
4/7/2010	9:38:48 AM	Helium MFC set to  0.000000
4/7/2010	9:38:48 AM	H2 MFC set to  0.000000
4/7/2010	9:38:48 AM	BCl3 MFC set to  0.000000
4/7/2010	9:38:48 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:38:48 AM	Bypass solenoid MFC set to  760.000000
4/7/2010	9:38:48 AM	Tube furnace set to 0
4/7/2010	9:38:50 AM	Bypass valve opened
4/7/2010	9:38:50 AM	Main Vac valve opened
4/7/2010	9:39:03 AM	Bypass valve closed
4/7/2010	9:39:04 AM	Main Vac valve closed
4/7/2010	9:39:07 AM	Helium MFC set to  500.000000
4/7/2010	9:39:09 AM	Helium valve opened
4/7/2010	9:40:23 AM	Helium MFC set to  100.000000
4/7/2010	9:40:38 AM	Bubbler valve opened
4/7/2010	9:40:50 AM	Helium MFC set to  500.000000
4/7/2010	9:41:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/7/2010	9:41:12 AM	Recipe started at 9:41 AM
4/7/2010	9:41:12 AM	Helium valve closed
4/7/2010	9:41:12 AM	H2 valve closed
4/7/2010	9:41:12 AM	BCl3 valve closed
4/7/2010	9:41:12 AM	PH3 valve closed
4/7/2010	9:41:12 AM	SiCl4 pre valve closed
4/7/2010	9:41:12 AM	SiCl4 post valve closed
4/7/2010	9:41:12 AM	Main Vac valve closed
4/7/2010	9:41:12 AM	Bypass valve closed
4/7/2010	9:41:12 AM	Bubbler valve closed
4/7/2010	9:41:12 AM	Helium MFC set to  0.000000
4/7/2010	9:41:12 AM	H2 MFC set to  0.000000
4/7/2010	9:41:12 AM	BCl3 MFC set to  0.000000
4/7/2010	9:41:12 AM	SiCl4 MFC set to  0.000000
4/7/2010	9:41:12 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	9:41:12 AM	Tube furnace set to 0
4/7/2010	9:41:12 AM	Run finished at 9:41 AM
4/7/2010	9:41:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/7/2010	9:41:18 AM	Program exited cleanly
4/7/2010	10:06:56 AM	Program started normally
4/7/2010	10:06:56 AM	Helium valve closed
4/7/2010	10:06:56 AM	H2 valve closed
4/7/2010	10:06:56 AM	BCl3 valve closed
4/7/2010	10:06:56 AM	PH3 valve closed
4/7/2010	10:06:56 AM	SiCl4 pre valve closed
4/7/2010	10:06:56 AM	SiCl4 post valve closed
4/7/2010	10:06:56 AM	Main Vac valve closed
4/7/2010	10:06:56 AM	Bypass valve closed
4/7/2010	10:06:56 AM	Bubbler valve closed
4/7/2010	10:06:56 AM	Helium MFC set to  0.000000
4/7/2010	10:06:56 AM	H2 MFC set to  0.000000
4/7/2010	10:06:56 AM	BCl3 MFC set to  0.000000
4/7/2010	10:06:56 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:06:56 AM	Bypass solenoid MFC set to  760.000000
4/7/2010	10:06:56 AM	Tube furnace set to 0
4/7/2010	10:06:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:06:57 AM	Recipe started at 10:06 AM
4/7/2010	10:06:57 AM	Helium valve closed
4/7/2010	10:06:57 AM	H2 valve closed
4/7/2010	10:06:57 AM	BCl3 valve closed
4/7/2010	10:06:57 AM	PH3 valve closed
4/7/2010	10:06:57 AM	SiCl4 pre valve closed
4/7/2010	10:06:57 AM	SiCl4 post valve closed
4/7/2010	10:06:57 AM	Main Vac valve closed
4/7/2010	10:06:57 AM	Bubbler valve closed
4/7/2010	10:06:57 AM	Bypass valve opened
4/7/2010	10:06:57 AM	Helium MFC set to  0.000000
4/7/2010	10:06:57 AM	H2 MFC set to  0.000000
4/7/2010	10:06:57 AM	BCl3 MFC set to  0.000000
4/7/2010	10:06:57 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:06:57 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:06:58 AM	Tube furnace set to 0
4/7/2010	10:07:36 AM	Helium valve closed
4/7/2010	10:07:36 AM	H2 valve closed
4/7/2010	10:07:36 AM	BCl3 valve closed
4/7/2010	10:07:36 AM	PH3 valve closed
4/7/2010	10:07:36 AM	SiCl4 pre valve closed
4/7/2010	10:07:36 AM	SiCl4 post valve closed
4/7/2010	10:07:36 AM	Bubbler valve closed
4/7/2010	10:07:36 AM	Main Vac valve opened
4/7/2010	10:07:36 AM	Bypass valve opened
4/7/2010	10:07:36 AM	Helium MFC set to  0.000000
4/7/2010	10:07:36 AM	H2 MFC set to  0.000000
4/7/2010	10:07:36 AM	BCl3 MFC set to  0.000000
4/7/2010	10:07:36 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:07:36 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:07:36 AM	Tube furnace set to 0
4/7/2010	10:07:37 AM	Run finished at 10:07 AM
4/7/2010	10:07:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:08:00 AM	Bypass valve closed
4/7/2010	10:08:00 AM	Main Vac valve closed
4/7/2010	10:08:01 AM	Helium valve opened
4/7/2010	10:08:05 AM	Helium MFC set to  500.000000
4/7/2010	10:09:30 AM	Bubbler valve opened
4/7/2010	10:23:01 AM	Bubbler valve closed
4/7/2010	10:23:01 AM	Helium valve closed
4/7/2010	10:23:03 AM	Bypass valve opened
4/7/2010	10:23:09 AM	Helium MFC set to  0.000000
4/7/2010	10:23:13 AM	H2 MFC set to  500.000000
4/7/2010	10:23:22 AM	Bypass valve closed
4/7/2010	10:23:24 AM	H2 valve opened
4/7/2010	10:24:04 AM	Bypass valve opened
4/7/2010	10:25:06 AM	Bypass valve closed
4/7/2010	10:25:16 AM	Helium valve closed
4/7/2010	10:25:16 AM	H2 valve closed
4/7/2010	10:25:16 AM	BCl3 valve closed
4/7/2010	10:25:16 AM	PH3 valve closed
4/7/2010	10:25:16 AM	SiCl4 pre valve closed
4/7/2010	10:25:16 AM	SiCl4 post valve closed
4/7/2010	10:25:16 AM	Main Vac valve closed
4/7/2010	10:25:16 AM	Bubbler valve closed
4/7/2010	10:25:16 AM	Bypass valve opened
4/7/2010	10:25:16 AM	Helium MFC set to  0.000000
4/7/2010	10:25:16 AM	H2 MFC set to  0.000000
4/7/2010	10:25:16 AM	BCl3 MFC set to  0.000000
4/7/2010	10:25:16 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:25:16 AM	Bypass solenoid MFC set to  760.000000
4/7/2010	10:25:16 AM	Tube furnace set to 0
4/7/2010	10:25:16 AM	Baratron reads 1029.191823 Torr.  Emergency exit.
4/7/2010	10:25:25 AM	Program exited cleanly
4/7/2010	10:25:40 AM	Program started normally
4/7/2010	10:25:40 AM	Helium valve closed
4/7/2010	10:25:40 AM	H2 valve closed
4/7/2010	10:25:40 AM	BCl3 valve closed
4/7/2010	10:25:40 AM	PH3 valve closed
4/7/2010	10:25:40 AM	SiCl4 pre valve closed
4/7/2010	10:25:40 AM	SiCl4 post valve closed
4/7/2010	10:25:40 AM	Main Vac valve closed
4/7/2010	10:25:40 AM	Bypass valve closed
4/7/2010	10:25:40 AM	Bubbler valve closed
4/7/2010	10:25:40 AM	Helium MFC set to  0.000000
4/7/2010	10:25:40 AM	H2 MFC set to  0.000000
4/7/2010	10:25:40 AM	BCl3 MFC set to  0.000000
4/7/2010	10:25:40 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:25:40 AM	Bypass solenoid MFC set to  760.000000
4/7/2010	10:25:41 AM	Tube furnace set to 0
4/7/2010	10:25:42 AM	Bypass valve opened
4/7/2010	10:25:43 AM	Main Vac valve opened
4/7/2010	10:26:14 AM	Bypass valve closed
4/7/2010	10:26:14 AM	Main Vac valve closed
4/7/2010	10:26:20 AM	H2 MFC set to  100.000000
4/7/2010	10:26:21 AM	H2 valve opened
4/7/2010	10:26:29 AM	H2 MFC set to  500.000000
4/7/2010	10:27:21 AM	Bypass valve opened
4/7/2010	10:28:56 AM	Main Vac valve opened
4/7/2010	10:30:09 AM	Bypass valve closed
4/7/2010	10:30:09 AM	Main Vac valve closed
4/7/2010	10:30:11 AM	H2 valve closed
4/7/2010	10:30:14 AM	H2 MFC set to  0.000000
4/7/2010	10:30:40 AM	H2 MFC set to  500.000000
4/7/2010	10:30:41 AM	H2 valve opened
4/7/2010	10:31:51 AM	Bypass valve opened
4/7/2010	10:32:50 AM	Main Vac valve opened
4/7/2010	10:34:05 AM	H2 valve closed
4/7/2010	10:34:16 AM	Bypass valve closed
4/7/2010	10:34:16 AM	Main Vac valve closed
4/7/2010	10:35:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:35:52 AM	Recipe started at 10:35 AM
4/7/2010	10:35:52 AM	H2 valve closed
4/7/2010	10:35:52 AM	BCl3 valve closed
4/7/2010	10:35:52 AM	PH3 valve closed
4/7/2010	10:35:52 AM	SiCl4 pre valve closed
4/7/2010	10:35:52 AM	SiCl4 post valve closed
4/7/2010	10:35:52 AM	Main Vac valve closed
4/7/2010	10:35:52 AM	Bypass valve closed
4/7/2010	10:35:52 AM	Bubbler valve closed
4/7/2010	10:35:52 AM	Helium valve opened
4/7/2010	10:35:52 AM	Helium MFC set to  500.000000
4/7/2010	10:35:52 AM	H2 MFC set to  0.000000
4/7/2010	10:35:52 AM	BCl3 MFC set to  0.000000
4/7/2010	10:35:52 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:35:52 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:35:52 AM	Tube furnace set to 0
4/7/2010	10:37:11 AM	Helium valve closed
4/7/2010	10:37:11 AM	H2 valve closed
4/7/2010	10:37:11 AM	BCl3 valve closed
4/7/2010	10:37:11 AM	PH3 valve closed
4/7/2010	10:37:11 AM	SiCl4 pre valve closed
4/7/2010	10:37:11 AM	SiCl4 post valve closed
4/7/2010	10:37:11 AM	Main Vac valve closed
4/7/2010	10:37:11 AM	Bypass valve closed
4/7/2010	10:37:11 AM	Bubbler valve closed
4/7/2010	10:37:11 AM	Helium MFC set to  0.000000
4/7/2010	10:37:11 AM	H2 MFC set to  0.000000
4/7/2010	10:37:11 AM	BCl3 MFC set to  0.000000
4/7/2010	10:37:11 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:37:11 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:37:11 AM	Tube furnace set to 0
4/7/2010	10:37:12 AM	Run finished at 10:37 AM
4/7/2010	10:37:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:42:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:42:44 AM	Recipe started at 10:42 AM
4/7/2010	10:42:44 AM	Helium valve closed
4/7/2010	10:42:44 AM	H2 valve closed
4/7/2010	10:42:44 AM	BCl3 valve closed
4/7/2010	10:42:44 AM	PH3 valve closed
4/7/2010	10:42:44 AM	SiCl4 pre valve closed
4/7/2010	10:42:44 AM	SiCl4 post valve closed
4/7/2010	10:42:44 AM	Main Vac valve closed
4/7/2010	10:42:44 AM	Bubbler valve closed
4/7/2010	10:42:44 AM	Bypass valve opened
4/7/2010	10:42:44 AM	Helium MFC set to  0.000000
4/7/2010	10:42:44 AM	H2 MFC set to  0.000000
4/7/2010	10:42:44 AM	BCl3 MFC set to  0.000000
4/7/2010	10:42:44 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:42:44 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:42:44 AM	Tube furnace set to 0
4/7/2010	10:43:22 AM	Helium valve closed
4/7/2010	10:43:22 AM	H2 valve closed
4/7/2010	10:43:22 AM	BCl3 valve closed
4/7/2010	10:43:22 AM	PH3 valve closed
4/7/2010	10:43:22 AM	SiCl4 pre valve closed
4/7/2010	10:43:22 AM	SiCl4 post valve closed
4/7/2010	10:43:22 AM	Bubbler valve closed
4/7/2010	10:43:22 AM	Main Vac valve opened
4/7/2010	10:43:22 AM	Bypass valve opened
4/7/2010	10:43:22 AM	Helium MFC set to  0.000000
4/7/2010	10:43:22 AM	H2 MFC set to  0.000000
4/7/2010	10:43:22 AM	BCl3 MFC set to  0.000000
4/7/2010	10:43:22 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:43:22 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:43:22 AM	Tube furnace set to 0
4/7/2010	10:43:22 AM	Run finished at 10:43 AM
4/7/2010	10:43:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:44:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:45:00 AM	Recipe started at 10:45 AM
4/7/2010	10:45:00 AM	H2 valve closed
4/7/2010	10:45:00 AM	BCl3 valve closed
4/7/2010	10:45:00 AM	PH3 valve closed
4/7/2010	10:45:00 AM	SiCl4 pre valve closed
4/7/2010	10:45:00 AM	SiCl4 post valve closed
4/7/2010	10:45:00 AM	Main Vac valve closed
4/7/2010	10:45:00 AM	Bypass valve closed
4/7/2010	10:45:00 AM	Bubbler valve closed
4/7/2010	10:45:00 AM	Helium valve opened
4/7/2010	10:45:00 AM	Helium MFC set to  500.000000
4/7/2010	10:45:00 AM	H2 MFC set to  0.000000
4/7/2010	10:45:00 AM	BCl3 MFC set to  0.000000
4/7/2010	10:45:00 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:45:00 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:45:00 AM	Tube furnace set to 0
4/7/2010	10:46:20 AM	Helium valve closed
4/7/2010	10:46:20 AM	H2 valve closed
4/7/2010	10:46:20 AM	BCl3 valve closed
4/7/2010	10:46:20 AM	PH3 valve closed
4/7/2010	10:46:20 AM	SiCl4 pre valve closed
4/7/2010	10:46:20 AM	SiCl4 post valve closed
4/7/2010	10:46:20 AM	Main Vac valve closed
4/7/2010	10:46:20 AM	Bypass valve closed
4/7/2010	10:46:20 AM	Bubbler valve closed
4/7/2010	10:46:20 AM	Helium MFC set to  0.000000
4/7/2010	10:46:20 AM	H2 MFC set to  0.000000
4/7/2010	10:46:20 AM	BCl3 MFC set to  0.000000
4/7/2010	10:46:20 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:46:20 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:46:20 AM	Tube furnace set to 0
4/7/2010	10:46:20 AM	Run finished at 10:46 AM
4/7/2010	10:46:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:46:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:46:24 AM	Recipe started at 10:46 AM
4/7/2010	10:46:24 AM	Helium valve closed
4/7/2010	10:46:24 AM	H2 valve closed
4/7/2010	10:46:24 AM	BCl3 valve closed
4/7/2010	10:46:24 AM	PH3 valve closed
4/7/2010	10:46:24 AM	SiCl4 pre valve closed
4/7/2010	10:46:24 AM	SiCl4 post valve closed
4/7/2010	10:46:24 AM	Main Vac valve closed
4/7/2010	10:46:24 AM	Bubbler valve closed
4/7/2010	10:46:24 AM	Bypass valve opened
4/7/2010	10:46:24 AM	Helium MFC set to  0.000000
4/7/2010	10:46:24 AM	H2 MFC set to  0.000000
4/7/2010	10:46:24 AM	BCl3 MFC set to  0.000000
4/7/2010	10:46:24 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:46:24 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:46:24 AM	Tube furnace set to 0
4/7/2010	10:46:51 AM	Helium valve closed
4/7/2010	10:46:51 AM	H2 valve closed
4/7/2010	10:46:51 AM	BCl3 valve closed
4/7/2010	10:46:51 AM	PH3 valve closed
4/7/2010	10:46:51 AM	SiCl4 pre valve closed
4/7/2010	10:46:51 AM	SiCl4 post valve closed
4/7/2010	10:46:51 AM	Bubbler valve closed
4/7/2010	10:46:51 AM	Main Vac valve opened
4/7/2010	10:46:51 AM	Bypass valve opened
4/7/2010	10:46:51 AM	Helium MFC set to  0.000000
4/7/2010	10:46:51 AM	H2 MFC set to  0.000000
4/7/2010	10:46:51 AM	BCl3 MFC set to  0.000000
4/7/2010	10:46:51 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:46:51 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:46:51 AM	Tube furnace set to 0
4/7/2010	10:46:52 AM	Run finished at 10:46 AM
4/7/2010	10:46:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:47:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:47:59 AM	Recipe started at 10:47 AM
4/7/2010	10:47:59 AM	H2 valve closed
4/7/2010	10:47:59 AM	BCl3 valve closed
4/7/2010	10:47:59 AM	PH3 valve closed
4/7/2010	10:47:59 AM	SiCl4 pre valve closed
4/7/2010	10:47:59 AM	SiCl4 post valve closed
4/7/2010	10:47:59 AM	Main Vac valve closed
4/7/2010	10:47:59 AM	Bypass valve closed
4/7/2010	10:47:59 AM	Bubbler valve closed
4/7/2010	10:47:59 AM	Helium valve opened
4/7/2010	10:47:59 AM	Helium MFC set to  500.000000
4/7/2010	10:47:59 AM	H2 MFC set to  0.000000
4/7/2010	10:47:59 AM	BCl3 MFC set to  0.000000
4/7/2010	10:47:59 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:47:59 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:47:59 AM	Tube furnace set to 0
4/7/2010	10:49:19 AM	Helium valve closed
4/7/2010	10:49:19 AM	H2 valve closed
4/7/2010	10:49:19 AM	BCl3 valve closed
4/7/2010	10:49:19 AM	PH3 valve closed
4/7/2010	10:49:19 AM	SiCl4 pre valve closed
4/7/2010	10:49:19 AM	SiCl4 post valve closed
4/7/2010	10:49:19 AM	Main Vac valve closed
4/7/2010	10:49:19 AM	Bypass valve closed
4/7/2010	10:49:19 AM	Bubbler valve closed
4/7/2010	10:49:19 AM	Helium MFC set to  0.000000
4/7/2010	10:49:19 AM	H2 MFC set to  0.000000
4/7/2010	10:49:19 AM	BCl3 MFC set to  0.000000
4/7/2010	10:49:19 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:49:19 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:49:19 AM	Tube furnace set to 0
4/7/2010	10:49:19 AM	Run finished at 10:49 AM
4/7/2010	10:49:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:49:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:49:22 AM	Recipe started at 10:49 AM
4/7/2010	10:49:22 AM	Helium valve closed
4/7/2010	10:49:22 AM	H2 valve closed
4/7/2010	10:49:22 AM	BCl3 valve closed
4/7/2010	10:49:22 AM	PH3 valve closed
4/7/2010	10:49:22 AM	SiCl4 pre valve closed
4/7/2010	10:49:22 AM	SiCl4 post valve closed
4/7/2010	10:49:22 AM	Main Vac valve closed
4/7/2010	10:49:22 AM	Bubbler valve closed
4/7/2010	10:49:22 AM	Bypass valve opened
4/7/2010	10:49:22 AM	Helium MFC set to  0.000000
4/7/2010	10:49:22 AM	H2 MFC set to  0.000000
4/7/2010	10:49:22 AM	BCl3 MFC set to  0.000000
4/7/2010	10:49:22 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:49:22 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:49:22 AM	Tube furnace set to 0
4/7/2010	10:49:49 AM	Helium valve closed
4/7/2010	10:49:49 AM	H2 valve closed
4/7/2010	10:49:49 AM	BCl3 valve closed
4/7/2010	10:49:49 AM	PH3 valve closed
4/7/2010	10:49:49 AM	SiCl4 pre valve closed
4/7/2010	10:49:49 AM	SiCl4 post valve closed
4/7/2010	10:49:49 AM	Bubbler valve closed
4/7/2010	10:49:49 AM	Main Vac valve opened
4/7/2010	10:49:49 AM	Bypass valve opened
4/7/2010	10:49:49 AM	Helium MFC set to  0.000000
4/7/2010	10:49:49 AM	H2 MFC set to  0.000000
4/7/2010	10:49:49 AM	BCl3 MFC set to  0.000000
4/7/2010	10:49:49 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:49:49 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:49:49 AM	Tube furnace set to 0
4/7/2010	10:49:49 AM	Run finished at 10:49 AM
4/7/2010	10:49:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:58:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:58:45 AM	Recipe started at 10:58 AM
4/7/2010	10:58:45 AM	H2 valve closed
4/7/2010	10:58:45 AM	BCl3 valve closed
4/7/2010	10:58:45 AM	PH3 valve closed
4/7/2010	10:58:45 AM	SiCl4 pre valve closed
4/7/2010	10:58:45 AM	SiCl4 post valve closed
4/7/2010	10:58:45 AM	Main Vac valve closed
4/7/2010	10:58:45 AM	Bypass valve closed
4/7/2010	10:58:45 AM	Bubbler valve closed
4/7/2010	10:58:45 AM	Helium valve opened
4/7/2010	10:58:45 AM	Helium MFC set to  500.000000
4/7/2010	10:58:45 AM	H2 MFC set to  0.000000
4/7/2010	10:58:45 AM	BCl3 MFC set to  0.000000
4/7/2010	10:58:45 AM	SiCl4 MFC set to  0.000000
4/7/2010	10:58:45 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:58:45 AM	Tube furnace set to 0
4/7/2010	11:00:05 AM	Helium valve closed
4/7/2010	11:00:05 AM	H2 valve closed
4/7/2010	11:00:05 AM	BCl3 valve closed
4/7/2010	11:00:05 AM	PH3 valve closed
4/7/2010	11:00:05 AM	SiCl4 pre valve closed
4/7/2010	11:00:05 AM	SiCl4 post valve closed
4/7/2010	11:00:05 AM	Main Vac valve closed
4/7/2010	11:00:05 AM	Bypass valve closed
4/7/2010	11:00:05 AM	Bubbler valve closed
4/7/2010	11:00:05 AM	Helium MFC set to  0.000000
4/7/2010	11:00:05 AM	H2 MFC set to  0.000000
4/7/2010	11:00:05 AM	BCl3 MFC set to  0.000000
4/7/2010	11:00:05 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:00:05 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:00:05 AM	Tube furnace set to 0
4/7/2010	11:00:06 AM	Run finished at 11:00 AM
4/7/2010	11:00:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	11:00:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	11:00:09 AM	Recipe started at 11:00 AM
4/7/2010	11:00:09 AM	Helium valve closed
4/7/2010	11:00:09 AM	H2 valve closed
4/7/2010	11:00:09 AM	BCl3 valve closed
4/7/2010	11:00:09 AM	PH3 valve closed
4/7/2010	11:00:09 AM	SiCl4 pre valve closed
4/7/2010	11:00:09 AM	SiCl4 post valve closed
4/7/2010	11:00:09 AM	Main Vac valve closed
4/7/2010	11:00:09 AM	Bubbler valve closed
4/7/2010	11:00:09 AM	Bypass valve opened
4/7/2010	11:00:09 AM	Helium MFC set to  0.000000
4/7/2010	11:00:09 AM	H2 MFC set to  0.000000
4/7/2010	11:00:09 AM	BCl3 MFC set to  0.000000
4/7/2010	11:00:09 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:00:09 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:00:09 AM	Tube furnace set to 0
4/7/2010	11:00:36 AM	Helium valve closed
4/7/2010	11:00:36 AM	H2 valve closed
4/7/2010	11:00:36 AM	BCl3 valve closed
4/7/2010	11:00:36 AM	PH3 valve closed
4/7/2010	11:00:36 AM	SiCl4 pre valve closed
4/7/2010	11:00:36 AM	SiCl4 post valve closed
4/7/2010	11:00:36 AM	Bubbler valve closed
4/7/2010	11:00:36 AM	Main Vac valve opened
4/7/2010	11:00:36 AM	Bypass valve opened
4/7/2010	11:00:36 AM	Helium MFC set to  0.000000
4/7/2010	11:00:36 AM	H2 MFC set to  0.000000
4/7/2010	11:00:36 AM	BCl3 MFC set to  0.000000
4/7/2010	11:00:36 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:00:36 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:00:37 AM	Tube furnace set to 0
4/7/2010	11:00:37 AM	Run finished at 11:00 AM
4/7/2010	11:00:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	11:01:26 AM	Recipe started at 11:01 AM
4/7/2010	11:01:26 AM	Helium valve closed
4/7/2010	11:01:26 AM	BCl3 valve closed
4/7/2010	11:01:26 AM	PH3 valve closed
4/7/2010	11:01:26 AM	SiCl4 pre valve closed
4/7/2010	11:01:26 AM	SiCl4 post valve closed
4/7/2010	11:01:26 AM	Main Vac valve closed
4/7/2010	11:01:26 AM	Bypass valve closed
4/7/2010	11:01:26 AM	Bubbler valve closed
4/7/2010	11:01:26 AM	H2 valve opened
4/7/2010	11:01:26 AM	Helium MFC set to  0.000000
4/7/2010	11:01:26 AM	H2 MFC set to  500.000000
4/7/2010	11:01:26 AM	BCl3 MFC set to  0.000000
4/7/2010	11:01:26 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:01:26 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:01:26 AM	Tube furnace set to 0
4/7/2010	11:02:49 AM	Helium valve closed
4/7/2010	11:02:49 AM	BCl3 valve closed
4/7/2010	11:02:49 AM	PH3 valve closed
4/7/2010	11:02:49 AM	SiCl4 pre valve closed
4/7/2010	11:02:49 AM	SiCl4 post valve closed
4/7/2010	11:02:49 AM	Main Vac valve closed
4/7/2010	11:02:49 AM	Bypass valve closed
4/7/2010	11:02:49 AM	H2 valve opened
4/7/2010	11:02:49 AM	Bubbler valve opened
4/7/2010	11:02:49 AM	Helium MFC set to  0.000000
4/7/2010	11:02:49 AM	H2 MFC set to  500.000000
4/7/2010	11:02:49 AM	BCl3 MFC set to  0.000000
4/7/2010	11:02:49 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:02:49 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:02:49 AM	Tube furnace set to 1000
4/7/2010	11:03:24 AM	Run aborted at 11:03 AM
4/7/2010	11:03:24 AM	Helium valve closed
4/7/2010	11:03:24 AM	H2 valve closed
4/7/2010	11:03:24 AM	BCl3 valve closed
4/7/2010	11:03:24 AM	PH3 valve closed
4/7/2010	11:03:24 AM	SiCl4 pre valve closed
4/7/2010	11:03:24 AM	SiCl4 post valve closed
4/7/2010	11:03:24 AM	Bypass valve closed
4/7/2010	11:03:24 AM	Main Vac valve closed
4/7/2010	11:03:24 AM	Bubbler valve closed
4/7/2010	11:03:24 AM	Helium MFC set to  0.000000
4/7/2010	11:03:24 AM	H2 MFC set to  0.000000
4/7/2010	11:03:24 AM	BCl3 MFC set to  0.000000
4/7/2010	11:03:24 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:03:24 AM	Tube furnace set to 0
4/7/2010	11:03:29 AM	Recipe started at 11:03 AM
4/7/2010	11:03:29 AM	Helium valve closed
4/7/2010	11:03:29 AM	BCl3 valve closed
4/7/2010	11:03:29 AM	PH3 valve closed
4/7/2010	11:03:29 AM	SiCl4 pre valve closed
4/7/2010	11:03:29 AM	SiCl4 post valve closed
4/7/2010	11:03:29 AM	Main Vac valve closed
4/7/2010	11:03:29 AM	Bypass valve closed
4/7/2010	11:03:29 AM	Bubbler valve closed
4/7/2010	11:03:29 AM	H2 valve opened
4/7/2010	11:03:29 AM	Helium MFC set to  0.000000
4/7/2010	11:03:29 AM	H2 MFC set to  500.000000
4/7/2010	11:03:29 AM	BCl3 MFC set to  0.000000
4/7/2010	11:03:29 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:03:29 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:03:29 AM	Tube furnace set to 0
4/7/2010	11:03:29 AM	Helium valve closed
4/7/2010	11:03:29 AM	BCl3 valve closed
4/7/2010	11:03:29 AM	PH3 valve closed
4/7/2010	11:03:29 AM	SiCl4 pre valve closed
4/7/2010	11:03:29 AM	SiCl4 post valve closed
4/7/2010	11:03:29 AM	Main Vac valve closed
4/7/2010	11:03:29 AM	Bypass valve closed
4/7/2010	11:03:29 AM	H2 valve opened
4/7/2010	11:03:29 AM	Bubbler valve opened
4/7/2010	11:03:29 AM	Helium MFC set to  0.000000
4/7/2010	11:03:29 AM	H2 MFC set to  500.000000
4/7/2010	11:03:29 AM	BCl3 MFC set to  0.000000
4/7/2010	11:03:29 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:03:29 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:03:29 AM	Tube furnace set to 1000
4/7/2010	11:20:34 AM	Helium valve closed
4/7/2010	11:20:34 AM	BCl3 valve closed
4/7/2010	11:20:34 AM	PH3 valve closed
4/7/2010	11:20:34 AM	Main Vac valve closed
4/7/2010	11:20:34 AM	Bypass valve closed
4/7/2010	11:20:34 AM	H2 valve opened
4/7/2010	11:20:34 AM	SiCl4 pre valve opened
4/7/2010	11:20:34 AM	SiCl4 post valve opened
4/7/2010	11:20:34 AM	Bubbler valve opened
4/7/2010	11:20:34 AM	Helium MFC set to  0.000000
4/7/2010	11:20:34 AM	H2 MFC set to  500.000000
4/7/2010	11:20:34 AM	BCl3 MFC set to  0.000000
4/7/2010	11:20:34 AM	SiCl4 MFC set to  80.000000
4/7/2010	11:20:34 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:20:34 AM	Tube furnace set to 1000
4/7/2010	11:26:13 AM	Run aborted at 11:26 AM
4/7/2010	11:26:13 AM	Helium valve closed
4/7/2010	11:26:13 AM	H2 valve closed
4/7/2010	11:26:13 AM	BCl3 valve closed
4/7/2010	11:26:13 AM	PH3 valve closed
4/7/2010	11:26:13 AM	SiCl4 pre valve closed
4/7/2010	11:26:13 AM	SiCl4 post valve closed
4/7/2010	11:26:13 AM	Bypass valve closed
4/7/2010	11:26:13 AM	Main Vac valve closed
4/7/2010	11:26:13 AM	Bubbler valve closed
4/7/2010	11:26:13 AM	Helium MFC set to  0.000000
4/7/2010	11:26:13 AM	H2 MFC set to  0.000000
4/7/2010	11:26:13 AM	BCl3 MFC set to  0.000000
4/7/2010	11:26:13 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:26:13 AM	Tube furnace set to 0
4/7/2010	11:26:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/7/2010	11:26:22 AM	Recipe started at 11:26 AM
4/7/2010	11:26:22 AM	Helium valve closed
4/7/2010	11:26:22 AM	H2 valve closed
4/7/2010	11:26:22 AM	BCl3 valve closed
4/7/2010	11:26:22 AM	PH3 valve closed
4/7/2010	11:26:22 AM	SiCl4 pre valve closed
4/7/2010	11:26:22 AM	SiCl4 post valve closed
4/7/2010	11:26:22 AM	Main Vac valve closed
4/7/2010	11:26:22 AM	Bypass valve closed
4/7/2010	11:26:22 AM	Bubbler valve closed
4/7/2010	11:26:22 AM	Helium MFC set to  0.000000
4/7/2010	11:26:22 AM	H2 MFC set to  0.000000
4/7/2010	11:26:22 AM	BCl3 MFC set to  0.000000
4/7/2010	11:26:22 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:26:22 AM	Bypass solenoid MFC set to  0.000000
4/7/2010	11:26:22 AM	Tube furnace set to 0
4/7/2010	11:26:23 AM	Run finished at 11:26 AM
4/7/2010	11:26:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/7/2010	11:27:36 AM	Bubbler valve opened
4/7/2010	11:28:05 AM	Helium MFC set to  200.000000
4/7/2010	11:28:07 AM	Helium valve opened
4/7/2010	11:30:52 AM	Helium MFC set to  500.000000
4/7/2010	11:38:26 AM	Tube furnace set to 1000
4/7/2010	11:45:51 AM	H2 MFC set to  500.000000
4/7/2010	11:45:53 AM	Helium valve closed
4/7/2010	11:45:54 AM	H2 valve opened
4/7/2010	11:46:19 AM	SiCl4 MFC set to  50.000000
4/7/2010	11:47:43 AM	SiCl4 pre valve opened
4/7/2010	11:47:44 AM	SiCl4 post valve opened
4/7/2010	11:48:11 AM	SiCl4 MFC set to  80.000000
4/7/2010	11:51:00 AM	SiCl4 pre valve closed
4/7/2010	11:51:01 AM	SiCl4 post valve closed
4/7/2010	11:52:40 AM	SiCl4 MFC set to  0.000000
4/7/2010	11:53:40 AM	H2 valve closed
4/7/2010	11:53:40 AM	Helium valve opened
4/7/2010	12:21:23 PM	Bubbler valve closed
4/7/2010	12:21:24 PM	Helium valve closed
4/7/2010	12:21:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	12:21:29 PM	Recipe started at 12:21 PM
4/7/2010	12:21:29 PM	Helium valve closed
4/7/2010	12:21:29 PM	H2 valve closed
4/7/2010	12:21:29 PM	BCl3 valve closed
4/7/2010	12:21:29 PM	PH3 valve closed
4/7/2010	12:21:29 PM	SiCl4 pre valve closed
4/7/2010	12:21:29 PM	SiCl4 post valve closed
4/7/2010	12:21:29 PM	Main Vac valve closed
4/7/2010	12:21:29 PM	Bubbler valve closed
4/7/2010	12:21:29 PM	Bypass valve opened
4/7/2010	12:21:29 PM	Helium MFC set to  0.000000
4/7/2010	12:21:29 PM	H2 MFC set to  0.000000
4/7/2010	12:21:29 PM	BCl3 MFC set to  0.000000
4/7/2010	12:21:29 PM	SiCl4 MFC set to  0.000000
4/7/2010	12:21:29 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	12:21:29 PM	Tube furnace set to 0
4/7/2010	12:21:57 PM	Helium valve closed
4/7/2010	12:21:57 PM	H2 valve closed
4/7/2010	12:21:57 PM	BCl3 valve closed
4/7/2010	12:21:57 PM	PH3 valve closed
4/7/2010	12:21:57 PM	SiCl4 pre valve closed
4/7/2010	12:21:57 PM	SiCl4 post valve closed
4/7/2010	12:21:57 PM	Bubbler valve closed
4/7/2010	12:21:57 PM	Main Vac valve opened
4/7/2010	12:21:57 PM	Bypass valve opened
4/7/2010	12:21:57 PM	Helium MFC set to  0.000000
4/7/2010	12:21:57 PM	H2 MFC set to  0.000000
4/7/2010	12:21:57 PM	BCl3 MFC set to  0.000000
4/7/2010	12:21:57 PM	SiCl4 MFC set to  0.000000
4/7/2010	12:21:57 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	12:21:57 PM	Tube furnace set to 0
4/7/2010	12:21:58 PM	Run finished at 12:21 PM
4/7/2010	12:21:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	2:09:46 PM	Main Vac valve closed
4/7/2010	2:09:47 PM	Bypass valve closed
4/7/2010	2:10:20 PM	Bypass valve opened
4/7/2010	2:10:20 PM	Main Vac valve opened
4/7/2010	2:11:45 PM	Bypass valve closed
4/7/2010	2:11:46 PM	Main Vac valve closed
4/7/2010	2:12:16 PM	Main Vac valve opened
4/7/2010	2:12:17 PM	Bypass valve opened
4/7/2010	2:14:15 PM	Main Vac valve closed
4/7/2010	2:14:27 PM	Main Vac valve opened
4/7/2010	2:14:34 PM	Bypass valve closed
4/7/2010	2:14:54 PM	Main Vac valve closed
4/7/2010	2:15:00 PM	Main Vac valve opened
4/7/2010	2:15:43 PM	Main Vac valve closed
4/7/2010	2:15:52 PM	Main Vac valve opened
4/7/2010	2:16:00 PM	Bypass valve opened
4/7/2010	2:16:08 PM	Main Vac valve closed
4/7/2010	2:17:24 PM	Main Vac valve opened
4/7/2010	2:17:56 PM	Main Vac valve closed
4/7/2010	2:18:23 PM	Bypass valve closed
4/7/2010	2:18:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	2:18:43 PM	Recipe started at 2:18 PM
4/7/2010	2:18:43 PM	H2 valve closed
4/7/2010	2:18:43 PM	BCl3 valve closed
4/7/2010	2:18:43 PM	PH3 valve closed
4/7/2010	2:18:43 PM	SiCl4 pre valve closed
4/7/2010	2:18:43 PM	SiCl4 post valve closed
4/7/2010	2:18:43 PM	Main Vac valve closed
4/7/2010	2:18:43 PM	Bypass valve closed
4/7/2010	2:18:43 PM	Bubbler valve closed
4/7/2010	2:18:43 PM	Helium valve opened
4/7/2010	2:18:43 PM	Helium MFC set to  500.000000
4/7/2010	2:18:43 PM	H2 MFC set to  0.000000
4/7/2010	2:18:43 PM	BCl3 MFC set to  0.000000
4/7/2010	2:18:43 PM	SiCl4 MFC set to  0.000000
4/7/2010	2:18:43 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	2:18:44 PM	Tube furnace set to 0
4/7/2010	2:20:03 PM	Helium valve closed
4/7/2010	2:20:03 PM	H2 valve closed
4/7/2010	2:20:03 PM	BCl3 valve closed
4/7/2010	2:20:03 PM	PH3 valve closed
4/7/2010	2:20:03 PM	SiCl4 pre valve closed
4/7/2010	2:20:03 PM	SiCl4 post valve closed
4/7/2010	2:20:03 PM	Main Vac valve closed
4/7/2010	2:20:03 PM	Bypass valve closed
4/7/2010	2:20:03 PM	Bubbler valve closed
4/7/2010	2:20:03 PM	Helium MFC set to  0.000000
4/7/2010	2:20:03 PM	H2 MFC set to  0.000000
4/7/2010	2:20:03 PM	BCl3 MFC set to  0.000000
4/7/2010	2:20:03 PM	SiCl4 MFC set to  0.000000
4/7/2010	2:20:03 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	2:20:03 PM	Tube furnace set to 0
4/7/2010	2:20:03 PM	Run finished at 2:20 PM
4/7/2010	2:20:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	2:37:08 PM	Bypass valve opened
4/7/2010	2:37:12 PM	Bypass valve closed
4/7/2010	2:37:14 PM	Bypass valve opened
4/7/2010	2:37:18 PM	Bypass valve closed
4/7/2010	2:37:19 PM	Bypass valve opened
4/7/2010	2:37:21 PM	Bypass valve closed
4/7/2010	2:37:23 PM	Bypass valve opened
4/7/2010	2:37:28 PM	Bypass valve closed
4/7/2010	2:37:30 PM	Bypass valve opened
4/7/2010	2:37:33 PM	Bypass valve closed
4/7/2010	2:39:13 PM	Bypass valve opened
4/7/2010	2:39:15 PM	Bypass valve closed
4/7/2010	2:39:18 PM	Bypass valve opened
4/7/2010	2:39:20 PM	Bypass valve closed
4/7/2010	2:41:45 PM	Bypass valve opened
4/7/2010	2:41:46 PM	Bypass valve closed
4/7/2010	2:41:48 PM	Bypass valve opened
4/7/2010	2:41:49 PM	Bypass valve closed
4/7/2010	2:41:50 PM	Bypass valve opened
4/7/2010	2:41:51 PM	Bypass valve closed
4/7/2010	2:41:54 PM	Bypass valve opened
4/7/2010	2:41:55 PM	Bypass valve closed
4/7/2010	2:41:57 PM	Bypass valve opened
4/7/2010	2:41:58 PM	Bypass valve closed
4/7/2010	2:42:05 PM	Bypass valve opened
4/7/2010	2:43:30 PM	Bypass valve closed
4/7/2010	2:43:32 PM	Bypass valve opened
4/7/2010	2:44:13 PM	Bypass valve closed
4/7/2010	2:55:23 PM	Bypass valve opened
4/7/2010	2:55:43 PM	Main Vac valve opened
4/7/2010	2:57:58 PM	Bypass valve closed
4/7/2010	2:58:00 PM	Main Vac valve closed
4/7/2010	2:58:14 PM	Main Vac valve opened
4/7/2010	2:58:17 PM	Bypass valve opened
4/7/2010	3:00:16 PM	Main Vac valve closed
4/7/2010	3:00:17 PM	Bypass valve closed
4/7/2010	3:02:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	3:02:08 PM	Recipe started at 3:02 PM
4/7/2010	3:02:08 PM	Helium valve closed
4/7/2010	3:02:08 PM	H2 valve closed
4/7/2010	3:02:08 PM	BCl3 valve closed
4/7/2010	3:02:08 PM	PH3 valve closed
4/7/2010	3:02:08 PM	SiCl4 pre valve closed
4/7/2010	3:02:08 PM	SiCl4 post valve closed
4/7/2010	3:02:08 PM	Main Vac valve closed
4/7/2010	3:02:08 PM	Bubbler valve closed
4/7/2010	3:02:08 PM	Bypass valve opened
4/7/2010	3:02:08 PM	Helium MFC set to  0.000000
4/7/2010	3:02:08 PM	H2 MFC set to  0.000000
4/7/2010	3:02:08 PM	BCl3 MFC set to  0.000000
4/7/2010	3:02:08 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:02:08 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:02:08 PM	Tube furnace set to 0
4/7/2010	3:02:52 PM	Helium valve closed
4/7/2010	3:02:52 PM	H2 valve closed
4/7/2010	3:02:52 PM	BCl3 valve closed
4/7/2010	3:02:52 PM	PH3 valve closed
4/7/2010	3:02:52 PM	SiCl4 pre valve closed
4/7/2010	3:02:52 PM	SiCl4 post valve closed
4/7/2010	3:02:52 PM	Bubbler valve closed
4/7/2010	3:02:52 PM	Main Vac valve opened
4/7/2010	3:02:52 PM	Bypass valve opened
4/7/2010	3:02:52 PM	Helium MFC set to  0.000000
4/7/2010	3:02:52 PM	H2 MFC set to  0.000000
4/7/2010	3:02:52 PM	BCl3 MFC set to  0.000000
4/7/2010	3:02:52 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:02:52 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:02:52 PM	Tube furnace set to 0
4/7/2010	3:02:53 PM	Run finished at 3:02 PM
4/7/2010	3:02:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	3:03:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/7/2010	3:03:27 PM	Recipe started at 3:03 PM
4/7/2010	3:03:27 PM	H2 valve closed
4/7/2010	3:03:27 PM	BCl3 valve closed
4/7/2010	3:03:27 PM	PH3 valve closed
4/7/2010	3:03:27 PM	SiCl4 pre valve closed
4/7/2010	3:03:27 PM	SiCl4 post valve closed
4/7/2010	3:03:27 PM	Main Vac valve closed
4/7/2010	3:03:27 PM	Bypass valve closed
4/7/2010	3:03:27 PM	Bubbler valve closed
4/7/2010	3:03:27 PM	Helium valve opened
4/7/2010	3:03:27 PM	Helium MFC set to  500.000000
4/7/2010	3:03:27 PM	H2 MFC set to  0.000000
4/7/2010	3:03:27 PM	BCl3 MFC set to  0.000000
4/7/2010	3:03:27 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:03:27 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:03:27 PM	Tube furnace set to 0
4/7/2010	3:04:49 PM	Helium valve closed
4/7/2010	3:04:49 PM	H2 valve closed
4/7/2010	3:04:49 PM	BCl3 valve closed
4/7/2010	3:04:49 PM	PH3 valve closed
4/7/2010	3:04:49 PM	SiCl4 pre valve closed
4/7/2010	3:04:49 PM	SiCl4 post valve closed
4/7/2010	3:04:49 PM	Main Vac valve closed
4/7/2010	3:04:49 PM	Bypass valve closed
4/7/2010	3:04:49 PM	Bubbler valve closed
4/7/2010	3:04:49 PM	Helium MFC set to  0.000000
4/7/2010	3:04:49 PM	H2 MFC set to  0.000000
4/7/2010	3:04:49 PM	BCl3 MFC set to  0.000000
4/7/2010	3:04:49 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:04:49 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:04:49 PM	Tube furnace set to 0
4/7/2010	3:05:04 PM	Helium valve closed
4/7/2010	3:05:04 PM	H2 valve closed
4/7/2010	3:05:04 PM	BCl3 valve closed
4/7/2010	3:05:04 PM	PH3 valve closed
4/7/2010	3:05:04 PM	SiCl4 pre valve closed
4/7/2010	3:05:04 PM	SiCl4 post valve closed
4/7/2010	3:05:04 PM	Main Vac valve closed
4/7/2010	3:05:04 PM	Bubbler valve closed
4/7/2010	3:05:04 PM	Bypass valve opened
4/7/2010	3:05:04 PM	Helium MFC set to  0.000000
4/7/2010	3:05:04 PM	H2 MFC set to  0.000000
4/7/2010	3:05:04 PM	BCl3 MFC set to  0.000000
4/7/2010	3:05:04 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:05:04 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:05:04 PM	Tube furnace set to 0
4/7/2010	3:05:32 PM	Helium valve closed
4/7/2010	3:05:32 PM	H2 valve closed
4/7/2010	3:05:32 PM	BCl3 valve closed
4/7/2010	3:05:32 PM	PH3 valve closed
4/7/2010	3:05:32 PM	SiCl4 pre valve closed
4/7/2010	3:05:32 PM	SiCl4 post valve closed
4/7/2010	3:05:32 PM	Bubbler valve closed
4/7/2010	3:05:32 PM	Main Vac valve opened
4/7/2010	3:05:32 PM	Bypass valve opened
4/7/2010	3:05:32 PM	Helium MFC set to  0.000000
4/7/2010	3:05:32 PM	H2 MFC set to  0.000000
4/7/2010	3:05:32 PM	BCl3 MFC set to  0.000000
4/7/2010	3:05:32 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:05:32 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:05:32 PM	Tube furnace set to 0
4/7/2010	3:10:32 PM	H2 valve closed
4/7/2010	3:10:32 PM	BCl3 valve closed
4/7/2010	3:10:32 PM	PH3 valve closed
4/7/2010	3:10:32 PM	SiCl4 pre valve closed
4/7/2010	3:10:32 PM	SiCl4 post valve closed
4/7/2010	3:10:32 PM	Main Vac valve closed
4/7/2010	3:10:32 PM	Bypass valve closed
4/7/2010	3:10:32 PM	Bubbler valve closed
4/7/2010	3:10:32 PM	Helium valve opened
4/7/2010	3:10:32 PM	Helium MFC set to  500.000000
4/7/2010	3:10:32 PM	H2 MFC set to  0.000000
4/7/2010	3:10:32 PM	BCl3 MFC set to  0.000000
4/7/2010	3:10:32 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:10:32 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:10:32 PM	Tube furnace set to 0
4/7/2010	3:11:54 PM	Helium valve closed
4/7/2010	3:11:54 PM	H2 valve closed
4/7/2010	3:11:54 PM	BCl3 valve closed
4/7/2010	3:11:54 PM	PH3 valve closed
4/7/2010	3:11:54 PM	SiCl4 pre valve closed
4/7/2010	3:11:54 PM	SiCl4 post valve closed
4/7/2010	3:11:54 PM	Main Vac valve closed
4/7/2010	3:11:54 PM	Bypass valve closed
4/7/2010	3:11:54 PM	Bubbler valve closed
4/7/2010	3:11:54 PM	Helium MFC set to  0.000000
4/7/2010	3:11:54 PM	H2 MFC set to  0.000000
4/7/2010	3:11:54 PM	BCl3 MFC set to  0.000000
4/7/2010	3:11:54 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:11:54 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:11:54 PM	Tube furnace set to 0
4/7/2010	3:12:09 PM	Helium valve closed
4/7/2010	3:12:10 PM	H2 valve closed
4/7/2010	3:12:10 PM	BCl3 valve closed
4/7/2010	3:12:10 PM	PH3 valve closed
4/7/2010	3:12:10 PM	SiCl4 pre valve closed
4/7/2010	3:12:10 PM	SiCl4 post valve closed
4/7/2010	3:12:10 PM	Main Vac valve closed
4/7/2010	3:12:10 PM	Bubbler valve closed
4/7/2010	3:12:10 PM	Bypass valve opened
4/7/2010	3:12:10 PM	Helium MFC set to  0.000000
4/7/2010	3:12:10 PM	H2 MFC set to  0.000000
4/7/2010	3:12:10 PM	BCl3 MFC set to  0.000000
4/7/2010	3:12:10 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:12:10 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:12:10 PM	Tube furnace set to 0
4/7/2010	3:12:37 PM	Helium valve closed
4/7/2010	3:12:37 PM	H2 valve closed
4/7/2010	3:12:37 PM	BCl3 valve closed
4/7/2010	3:12:37 PM	PH3 valve closed
4/7/2010	3:12:37 PM	SiCl4 pre valve closed
4/7/2010	3:12:37 PM	SiCl4 post valve closed
4/7/2010	3:12:37 PM	Bubbler valve closed
4/7/2010	3:12:37 PM	Main Vac valve opened
4/7/2010	3:12:37 PM	Bypass valve opened
4/7/2010	3:12:37 PM	Helium MFC set to  0.000000
4/7/2010	3:12:37 PM	H2 MFC set to  0.000000
4/7/2010	3:12:37 PM	BCl3 MFC set to  0.000000
4/7/2010	3:12:37 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:12:37 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:12:37 PM	Tube furnace set to 0
4/7/2010	3:17:37 PM	H2 valve closed
4/7/2010	3:17:37 PM	BCl3 valve closed
4/7/2010	3:17:37 PM	PH3 valve closed
4/7/2010	3:17:37 PM	SiCl4 pre valve closed
4/7/2010	3:17:37 PM	SiCl4 post valve closed
4/7/2010	3:17:37 PM	Main Vac valve closed
4/7/2010	3:17:37 PM	Bypass valve closed
4/7/2010	3:17:37 PM	Bubbler valve closed
4/7/2010	3:17:37 PM	Helium valve opened
4/7/2010	3:17:37 PM	Helium MFC set to  500.000000
4/7/2010	3:17:37 PM	H2 MFC set to  0.000000
4/7/2010	3:17:37 PM	BCl3 MFC set to  0.000000
4/7/2010	3:17:37 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:17:37 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:17:37 PM	Tube furnace set to 0
4/7/2010	3:19:00 PM	Helium valve closed
4/7/2010	3:19:00 PM	H2 valve closed
4/7/2010	3:19:00 PM	BCl3 valve closed
4/7/2010	3:19:00 PM	PH3 valve closed
4/7/2010	3:19:00 PM	SiCl4 pre valve closed
4/7/2010	3:19:00 PM	SiCl4 post valve closed
4/7/2010	3:19:00 PM	Main Vac valve closed
4/7/2010	3:19:00 PM	Bypass valve closed
4/7/2010	3:19:00 PM	Bubbler valve closed
4/7/2010	3:19:00 PM	Helium MFC set to  0.000000
4/7/2010	3:19:00 PM	H2 MFC set to  0.000000
4/7/2010	3:19:00 PM	BCl3 MFC set to  0.000000
4/7/2010	3:19:00 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:19:00 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:19:00 PM	Tube furnace set to 0
4/7/2010	3:19:15 PM	Helium valve closed
4/7/2010	3:19:15 PM	H2 valve closed
4/7/2010	3:19:15 PM	BCl3 valve closed
4/7/2010	3:19:15 PM	PH3 valve closed
4/7/2010	3:19:15 PM	SiCl4 pre valve closed
4/7/2010	3:19:15 PM	SiCl4 post valve closed
4/7/2010	3:19:15 PM	Main Vac valve closed
4/7/2010	3:19:15 PM	Bubbler valve closed
4/7/2010	3:19:15 PM	Bypass valve opened
4/7/2010	3:19:15 PM	Helium MFC set to  0.000000
4/7/2010	3:19:15 PM	H2 MFC set to  0.000000
4/7/2010	3:19:15 PM	BCl3 MFC set to  0.000000
4/7/2010	3:19:15 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:19:15 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:19:15 PM	Tube furnace set to 0
4/7/2010	3:19:42 PM	Helium valve closed
4/7/2010	3:19:42 PM	H2 valve closed
4/7/2010	3:19:42 PM	BCl3 valve closed
4/7/2010	3:19:42 PM	PH3 valve closed
4/7/2010	3:19:42 PM	SiCl4 pre valve closed
4/7/2010	3:19:42 PM	SiCl4 post valve closed
4/7/2010	3:19:42 PM	Bubbler valve closed
4/7/2010	3:19:42 PM	Main Vac valve opened
4/7/2010	3:19:42 PM	Bypass valve opened
4/7/2010	3:19:42 PM	Helium MFC set to  0.000000
4/7/2010	3:19:42 PM	H2 MFC set to  0.000000
4/7/2010	3:19:42 PM	BCl3 MFC set to  0.000000
4/7/2010	3:19:42 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:19:42 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:19:42 PM	Tube furnace set to 0
4/7/2010	3:24:42 PM	Helium valve closed
4/7/2010	3:24:42 PM	H2 valve closed
4/7/2010	3:24:42 PM	BCl3 valve closed
4/7/2010	3:24:42 PM	PH3 valve closed
4/7/2010	3:24:42 PM	SiCl4 pre valve closed
4/7/2010	3:24:42 PM	SiCl4 post valve closed
4/7/2010	3:24:42 PM	Bubbler valve closed
4/7/2010	3:24:42 PM	Main Vac valve opened
4/7/2010	3:24:42 PM	Bypass valve opened
4/7/2010	3:24:42 PM	Helium MFC set to  0.000000
4/7/2010	3:24:42 PM	H2 MFC set to  0.000000
4/7/2010	3:24:42 PM	BCl3 MFC set to  0.000000
4/7/2010	3:24:42 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:24:42 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:24:43 PM	Tube furnace set to 0
4/7/2010	3:24:44 PM	Run finished at 3:24 PM
4/7/2010	3:24:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/7/2010	3:50:16 PM	Bypass valve closed
4/7/2010	3:50:17 PM	Main Vac valve closed
4/7/2010	3:56:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	3:56:42 PM	Recipe started at 3:56 PM
4/7/2010	3:56:42 PM	H2 valve closed
4/7/2010	3:56:42 PM	BCl3 valve closed
4/7/2010	3:56:42 PM	PH3 valve closed
4/7/2010	3:56:42 PM	SiCl4 pre valve closed
4/7/2010	3:56:42 PM	SiCl4 post valve closed
4/7/2010	3:56:42 PM	Main Vac valve closed
4/7/2010	3:56:42 PM	Bypass valve closed
4/7/2010	3:56:42 PM	Bubbler valve closed
4/7/2010	3:56:42 PM	Helium valve opened
4/7/2010	3:56:42 PM	Helium MFC set to  500.000000
4/7/2010	3:56:42 PM	H2 MFC set to  0.000000
4/7/2010	3:56:42 PM	BCl3 MFC set to  0.000000
4/7/2010	3:56:42 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:56:42 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:56:42 PM	Tube furnace set to 0
4/7/2010	3:58:02 PM	Helium valve closed
4/7/2010	3:58:02 PM	H2 valve closed
4/7/2010	3:58:02 PM	BCl3 valve closed
4/7/2010	3:58:02 PM	PH3 valve closed
4/7/2010	3:58:02 PM	SiCl4 pre valve closed
4/7/2010	3:58:02 PM	SiCl4 post valve closed
4/7/2010	3:58:02 PM	Main Vac valve closed
4/7/2010	3:58:02 PM	Bypass valve closed
4/7/2010	3:58:02 PM	Bubbler valve closed
4/7/2010	3:58:02 PM	Helium MFC set to  0.000000
4/7/2010	3:58:02 PM	H2 MFC set to  0.000000
4/7/2010	3:58:02 PM	BCl3 MFC set to  0.000000
4/7/2010	3:58:02 PM	SiCl4 MFC set to  0.000000
4/7/2010	3:58:02 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	3:58:02 PM	Tube furnace set to 0
4/7/2010	3:58:02 PM	Run finished at 3:58 PM
4/7/2010	3:58:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	4:09:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:09:13 PM	Recipe started at 4:09 PM
4/7/2010	4:09:13 PM	Helium valve closed
4/7/2010	4:09:13 PM	H2 valve closed
4/7/2010	4:09:13 PM	BCl3 valve closed
4/7/2010	4:09:13 PM	PH3 valve closed
4/7/2010	4:09:13 PM	SiCl4 pre valve closed
4/7/2010	4:09:13 PM	SiCl4 post valve closed
4/7/2010	4:09:13 PM	Main Vac valve closed
4/7/2010	4:09:13 PM	Bubbler valve closed
4/7/2010	4:09:13 PM	Bypass valve opened
4/7/2010	4:09:13 PM	Helium MFC set to  0.000000
4/7/2010	4:09:13 PM	H2 MFC set to  0.000000
4/7/2010	4:09:13 PM	BCl3 MFC set to  0.000000
4/7/2010	4:09:13 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:09:13 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:09:13 PM	Tube furnace set to 0
4/7/2010	4:09:51 PM	Helium valve closed
4/7/2010	4:09:51 PM	H2 valve closed
4/7/2010	4:09:51 PM	BCl3 valve closed
4/7/2010	4:09:51 PM	PH3 valve closed
4/7/2010	4:09:51 PM	SiCl4 pre valve closed
4/7/2010	4:09:51 PM	SiCl4 post valve closed
4/7/2010	4:09:51 PM	Bubbler valve closed
4/7/2010	4:09:51 PM	Main Vac valve opened
4/7/2010	4:09:51 PM	Bypass valve opened
4/7/2010	4:09:51 PM	Helium MFC set to  0.000000
4/7/2010	4:09:51 PM	H2 MFC set to  0.000000
4/7/2010	4:09:51 PM	BCl3 MFC set to  0.000000
4/7/2010	4:09:51 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:09:51 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:09:51 PM	Tube furnace set to 0
4/7/2010	4:09:51 PM	Run finished at 4:09 PM
4/7/2010	4:09:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:19:34 PM	Bypass valve closed
4/7/2010	4:19:35 PM	Main Vac valve closed
4/7/2010	4:19:50 PM	Main Vac valve opened
4/7/2010	4:19:50 PM	Bypass valve opened
4/7/2010	4:22:01 PM	Bypass valve closed
4/7/2010	4:22:02 PM	Main Vac valve closed
4/7/2010	4:23:05 PM	Bypass valve opened
4/7/2010	4:23:05 PM	Main Vac valve opened
4/7/2010	4:24:53 PM	Bypass valve closed
4/7/2010	4:24:53 PM	Main Vac valve closed
4/7/2010	4:24:57 PM	H2 MFC set to  500.000000
4/7/2010	4:24:59 PM	H2 valve opened
4/7/2010	4:26:29 PM	H2 valve closed
4/7/2010	4:29:59 PM	Bubbler valve opened
4/7/2010	4:30:05 PM	Helium MFC set to  500.000000
4/7/2010	4:30:06 PM	Helium valve opened
4/7/2010	4:31:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:31:16 PM	Recipe started at 4:31 PM
4/7/2010	4:31:16 PM	Helium valve closed
4/7/2010	4:31:16 PM	H2 valve closed
4/7/2010	4:31:16 PM	BCl3 valve closed
4/7/2010	4:31:16 PM	PH3 valve closed
4/7/2010	4:31:16 PM	SiCl4 pre valve closed
4/7/2010	4:31:16 PM	SiCl4 post valve closed
4/7/2010	4:31:16 PM	Main Vac valve closed
4/7/2010	4:31:16 PM	Bubbler valve closed
4/7/2010	4:31:16 PM	Bypass valve opened
4/7/2010	4:31:16 PM	Helium MFC set to  0.000000
4/7/2010	4:31:16 PM	H2 MFC set to  0.000000
4/7/2010	4:31:16 PM	BCl3 MFC set to  0.000000
4/7/2010	4:31:16 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:31:16 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:31:17 PM	Tube furnace set to 0
4/7/2010	4:31:41 PM	Helium valve closed
4/7/2010	4:31:41 PM	H2 valve closed
4/7/2010	4:31:41 PM	BCl3 valve closed
4/7/2010	4:31:41 PM	PH3 valve closed
4/7/2010	4:31:41 PM	SiCl4 pre valve closed
4/7/2010	4:31:41 PM	SiCl4 post valve closed
4/7/2010	4:31:41 PM	Bubbler valve closed
4/7/2010	4:31:41 PM	Main Vac valve opened
4/7/2010	4:31:41 PM	Bypass valve opened
4/7/2010	4:31:41 PM	Helium MFC set to  0.000000
4/7/2010	4:31:41 PM	H2 MFC set to  0.000000
4/7/2010	4:31:41 PM	BCl3 MFC set to  0.000000
4/7/2010	4:31:41 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:31:41 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:31:41 PM	Tube furnace set to 0
4/7/2010	4:31:41 PM	Run finished at 4:31 PM
4/7/2010	4:31:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:34:23 PM	Bypass valve closed
4/7/2010	4:34:24 PM	Main Vac valve closed
4/7/2010	4:34:45 PM	Main Vac valve opened
4/7/2010	4:34:46 PM	Bypass valve opened
4/7/2010	4:36:53 PM	Bypass valve closed
4/7/2010	4:36:54 PM	Main Vac valve closed
4/7/2010	4:37:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	4:37:06 PM	Recipe started at 4:37 PM
4/7/2010	4:37:06 PM	H2 valve closed
4/7/2010	4:37:06 PM	BCl3 valve closed
4/7/2010	4:37:06 PM	PH3 valve closed
4/7/2010	4:37:06 PM	SiCl4 pre valve closed
4/7/2010	4:37:06 PM	SiCl4 post valve closed
4/7/2010	4:37:06 PM	Main Vac valve closed
4/7/2010	4:37:06 PM	Bypass valve closed
4/7/2010	4:37:06 PM	Bubbler valve closed
4/7/2010	4:37:06 PM	Helium valve opened
4/7/2010	4:37:06 PM	Helium MFC set to  500.000000
4/7/2010	4:37:06 PM	H2 MFC set to  0.000000
4/7/2010	4:37:06 PM	BCl3 MFC set to  0.000000
4/7/2010	4:37:06 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:37:06 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:37:06 PM	Tube furnace set to 0
4/7/2010	4:38:26 PM	Helium valve closed
4/7/2010	4:38:26 PM	H2 valve closed
4/7/2010	4:38:26 PM	BCl3 valve closed
4/7/2010	4:38:26 PM	PH3 valve closed
4/7/2010	4:38:26 PM	SiCl4 pre valve closed
4/7/2010	4:38:26 PM	SiCl4 post valve closed
4/7/2010	4:38:26 PM	Main Vac valve closed
4/7/2010	4:38:26 PM	Bypass valve closed
4/7/2010	4:38:26 PM	Bubbler valve closed
4/7/2010	4:38:26 PM	Helium MFC set to  0.000000
4/7/2010	4:38:26 PM	H2 MFC set to  0.000000
4/7/2010	4:38:26 PM	BCl3 MFC set to  0.000000
4/7/2010	4:38:26 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:38:26 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:38:26 PM	Tube furnace set to 0
4/7/2010	4:38:26 PM	Run finished at 4:38 PM
4/7/2010	4:38:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	4:38:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:38:58 PM	Recipe started at 4:38 PM
4/7/2010	4:38:58 PM	Helium valve closed
4/7/2010	4:38:58 PM	H2 valve closed
4/7/2010	4:38:58 PM	BCl3 valve closed
4/7/2010	4:38:58 PM	PH3 valve closed
4/7/2010	4:38:58 PM	SiCl4 pre valve closed
4/7/2010	4:38:58 PM	SiCl4 post valve closed
4/7/2010	4:38:58 PM	Main Vac valve closed
4/7/2010	4:38:58 PM	Bubbler valve closed
4/7/2010	4:38:58 PM	Bypass valve opened
4/7/2010	4:38:58 PM	Helium MFC set to  0.000000
4/7/2010	4:38:58 PM	H2 MFC set to  0.000000
4/7/2010	4:38:58 PM	BCl3 MFC set to  0.000000
4/7/2010	4:38:58 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:38:58 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:38:58 PM	Tube furnace set to 0
4/7/2010	4:39:25 PM	Helium valve closed
4/7/2010	4:39:25 PM	H2 valve closed
4/7/2010	4:39:25 PM	BCl3 valve closed
4/7/2010	4:39:25 PM	PH3 valve closed
4/7/2010	4:39:25 PM	SiCl4 pre valve closed
4/7/2010	4:39:25 PM	SiCl4 post valve closed
4/7/2010	4:39:25 PM	Bubbler valve closed
4/7/2010	4:39:25 PM	Main Vac valve opened
4/7/2010	4:39:25 PM	Bypass valve opened
4/7/2010	4:39:25 PM	Helium MFC set to  0.000000
4/7/2010	4:39:25 PM	H2 MFC set to  0.000000
4/7/2010	4:39:25 PM	BCl3 MFC set to  0.000000
4/7/2010	4:39:25 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:39:25 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:39:25 PM	Tube furnace set to 0
4/7/2010	4:39:25 PM	Run finished at 4:39 PM
4/7/2010	4:39:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:40:52 PM	Bypass valve closed
4/7/2010	4:40:53 PM	Main Vac valve closed
4/7/2010	4:42:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:42:21 PM	Recipe started at 4:42 PM
4/7/2010	4:42:21 PM	Helium valve closed
4/7/2010	4:42:21 PM	H2 valve closed
4/7/2010	4:42:21 PM	BCl3 valve closed
4/7/2010	4:42:21 PM	PH3 valve closed
4/7/2010	4:42:21 PM	SiCl4 pre valve closed
4/7/2010	4:42:21 PM	SiCl4 post valve closed
4/7/2010	4:42:21 PM	Main Vac valve closed
4/7/2010	4:42:21 PM	Bubbler valve closed
4/7/2010	4:42:21 PM	Bypass valve opened
4/7/2010	4:42:21 PM	Helium MFC set to  0.000000
4/7/2010	4:42:21 PM	H2 MFC set to  0.000000
4/7/2010	4:42:21 PM	BCl3 MFC set to  0.000000
4/7/2010	4:42:21 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:42:21 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:42:21 PM	Tube furnace set to 0
4/7/2010	4:42:47 PM	Helium valve closed
4/7/2010	4:42:47 PM	H2 valve closed
4/7/2010	4:42:47 PM	BCl3 valve closed
4/7/2010	4:42:47 PM	PH3 valve closed
4/7/2010	4:42:47 PM	SiCl4 pre valve closed
4/7/2010	4:42:47 PM	SiCl4 post valve closed
4/7/2010	4:42:47 PM	Bubbler valve closed
4/7/2010	4:42:47 PM	Main Vac valve opened
4/7/2010	4:42:47 PM	Bypass valve opened
4/7/2010	4:42:47 PM	Helium MFC set to  0.000000
4/7/2010	4:42:47 PM	H2 MFC set to  0.000000
4/7/2010	4:42:47 PM	BCl3 MFC set to  0.000000
4/7/2010	4:42:47 PM	SiCl4 MFC set to  0.000000
4/7/2010	4:42:47 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	4:42:47 PM	Tube furnace set to 0
4/7/2010	4:42:47 PM	Run finished at 4:42 PM
4/7/2010	4:42:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	4:48:26 PM	Bypass valve closed
4/7/2010	4:48:27 PM	Main Vac valve closed
4/7/2010	4:48:39 PM	Bypass valve opened
4/7/2010	4:48:40 PM	Main Vac valve opened
4/7/2010	4:53:43 PM	Bypass valve closed
4/7/2010	4:53:43 PM	Main Vac valve closed
4/7/2010	4:54:07 PM	Bypass valve opened
4/7/2010	4:54:08 PM	Main Vac valve opened
4/7/2010	4:56:31 PM	Bypass valve closed
4/7/2010	4:56:32 PM	Main Vac valve closed
4/7/2010	4:58:11 PM	Bypass valve opened
4/7/2010	4:58:12 PM	Main Vac valve opened
4/7/2010	4:58:43 PM	Bypass valve closed
4/7/2010	4:58:44 PM	Main Vac valve closed
4/7/2010	5:19:19 PM	Bypass valve opened
4/7/2010	5:19:20 PM	Main Vac valve opened
4/7/2010	5:21:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	5:21:26 PM	Recipe started at 5:21 PM
4/7/2010	5:21:26 PM	H2 valve closed
4/7/2010	5:21:26 PM	BCl3 valve closed
4/7/2010	5:21:26 PM	PH3 valve closed
4/7/2010	5:21:26 PM	SiCl4 pre valve closed
4/7/2010	5:21:26 PM	SiCl4 post valve closed
4/7/2010	5:21:26 PM	Main Vac valve closed
4/7/2010	5:21:26 PM	Bypass valve closed
4/7/2010	5:21:26 PM	Bubbler valve closed
4/7/2010	5:21:26 PM	Helium valve opened
4/7/2010	5:21:26 PM	Helium MFC set to  500.000000
4/7/2010	5:21:26 PM	H2 MFC set to  0.000000
4/7/2010	5:21:26 PM	BCl3 MFC set to  0.000000
4/7/2010	5:21:26 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:21:26 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:21:27 PM	Tube furnace set to 0
4/7/2010	5:22:47 PM	Helium valve closed
4/7/2010	5:22:47 PM	H2 valve closed
4/7/2010	5:22:47 PM	BCl3 valve closed
4/7/2010	5:22:47 PM	PH3 valve closed
4/7/2010	5:22:47 PM	SiCl4 pre valve closed
4/7/2010	5:22:47 PM	SiCl4 post valve closed
4/7/2010	5:22:47 PM	Main Vac valve closed
4/7/2010	5:22:47 PM	Bypass valve closed
4/7/2010	5:22:47 PM	Bubbler valve closed
4/7/2010	5:22:47 PM	Helium MFC set to  0.000000
4/7/2010	5:22:47 PM	H2 MFC set to  0.000000
4/7/2010	5:22:47 PM	BCl3 MFC set to  0.000000
4/7/2010	5:22:47 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:22:47 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:22:47 PM	Tube furnace set to 0
4/7/2010	5:22:47 PM	Run finished at 5:22 PM
4/7/2010	5:22:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	5:22:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	5:22:52 PM	Recipe started at 5:22 PM
4/7/2010	5:22:52 PM	Helium valve closed
4/7/2010	5:22:52 PM	H2 valve closed
4/7/2010	5:22:52 PM	BCl3 valve closed
4/7/2010	5:22:52 PM	PH3 valve closed
4/7/2010	5:22:52 PM	SiCl4 pre valve closed
4/7/2010	5:22:52 PM	SiCl4 post valve closed
4/7/2010	5:22:52 PM	Main Vac valve closed
4/7/2010	5:22:52 PM	Bubbler valve closed
4/7/2010	5:22:52 PM	Bypass valve opened
4/7/2010	5:22:52 PM	Helium MFC set to  0.000000
4/7/2010	5:22:52 PM	H2 MFC set to  0.000000
4/7/2010	5:22:52 PM	BCl3 MFC set to  0.000000
4/7/2010	5:22:52 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:22:52 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:22:52 PM	Tube furnace set to 0
4/7/2010	5:23:19 PM	Helium valve closed
4/7/2010	5:23:19 PM	H2 valve closed
4/7/2010	5:23:19 PM	BCl3 valve closed
4/7/2010	5:23:19 PM	PH3 valve closed
4/7/2010	5:23:19 PM	SiCl4 pre valve closed
4/7/2010	5:23:19 PM	SiCl4 post valve closed
4/7/2010	5:23:19 PM	Bubbler valve closed
4/7/2010	5:23:19 PM	Main Vac valve opened
4/7/2010	5:23:19 PM	Bypass valve opened
4/7/2010	5:23:19 PM	Helium MFC set to  0.000000
4/7/2010	5:23:19 PM	H2 MFC set to  0.000000
4/7/2010	5:23:19 PM	BCl3 MFC set to  0.000000
4/7/2010	5:23:19 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:23:19 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:23:19 PM	Tube furnace set to 0
4/7/2010	5:23:19 PM	Run finished at 5:23 PM
4/7/2010	5:23:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	5:24:26 PM	Bypass valve closed
4/7/2010	5:24:27 PM	Main Vac valve closed
4/7/2010	5:24:41 PM	Bypass valve opened
4/7/2010	5:24:41 PM	Main Vac valve opened
4/7/2010	5:24:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/7/2010	5:24:55 PM	Recipe started at 5:24 PM
4/7/2010	5:24:55 PM	H2 valve closed
4/7/2010	5:24:55 PM	BCl3 valve closed
4/7/2010	5:24:55 PM	PH3 valve closed
4/7/2010	5:24:55 PM	SiCl4 pre valve closed
4/7/2010	5:24:55 PM	SiCl4 post valve closed
4/7/2010	5:24:55 PM	Main Vac valve closed
4/7/2010	5:24:55 PM	Bypass valve closed
4/7/2010	5:24:55 PM	Bubbler valve closed
4/7/2010	5:24:55 PM	Helium valve opened
4/7/2010	5:24:55 PM	Helium MFC set to  500.000000
4/7/2010	5:24:55 PM	H2 MFC set to  0.000000
4/7/2010	5:24:55 PM	BCl3 MFC set to  0.000000
4/7/2010	5:24:55 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:24:55 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:24:56 PM	Tube furnace set to 0
4/7/2010	5:26:18 PM	Helium valve closed
4/7/2010	5:26:18 PM	H2 valve closed
4/7/2010	5:26:18 PM	BCl3 valve closed
4/7/2010	5:26:18 PM	PH3 valve closed
4/7/2010	5:26:18 PM	SiCl4 pre valve closed
4/7/2010	5:26:18 PM	SiCl4 post valve closed
4/7/2010	5:26:18 PM	Main Vac valve closed
4/7/2010	5:26:18 PM	Bypass valve closed
4/7/2010	5:26:18 PM	Bubbler valve closed
4/7/2010	5:26:18 PM	Helium MFC set to  0.000000
4/7/2010	5:26:18 PM	H2 MFC set to  0.000000
4/7/2010	5:26:18 PM	BCl3 MFC set to  0.000000
4/7/2010	5:26:18 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:26:18 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:26:18 PM	Tube furnace set to 0
4/7/2010	5:26:33 PM	Helium valve closed
4/7/2010	5:26:33 PM	H2 valve closed
4/7/2010	5:26:33 PM	BCl3 valve closed
4/7/2010	5:26:33 PM	PH3 valve closed
4/7/2010	5:26:33 PM	SiCl4 pre valve closed
4/7/2010	5:26:33 PM	SiCl4 post valve closed
4/7/2010	5:26:33 PM	Main Vac valve closed
4/7/2010	5:26:33 PM	Bubbler valve closed
4/7/2010	5:26:33 PM	Bypass valve opened
4/7/2010	5:26:33 PM	Helium MFC set to  0.000000
4/7/2010	5:26:33 PM	H2 MFC set to  0.000000
4/7/2010	5:26:33 PM	BCl3 MFC set to  0.000000
4/7/2010	5:26:33 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:26:33 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:26:33 PM	Tube furnace set to 0
4/7/2010	5:27:01 PM	Helium valve closed
4/7/2010	5:27:01 PM	H2 valve closed
4/7/2010	5:27:01 PM	BCl3 valve closed
4/7/2010	5:27:01 PM	PH3 valve closed
4/7/2010	5:27:01 PM	SiCl4 pre valve closed
4/7/2010	5:27:01 PM	SiCl4 post valve closed
4/7/2010	5:27:01 PM	Bubbler valve closed
4/7/2010	5:27:01 PM	Main Vac valve opened
4/7/2010	5:27:01 PM	Bypass valve opened
4/7/2010	5:27:01 PM	Helium MFC set to  0.000000
4/7/2010	5:27:01 PM	H2 MFC set to  0.000000
4/7/2010	5:27:01 PM	BCl3 MFC set to  0.000000
4/7/2010	5:27:01 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:27:01 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:27:01 PM	Tube furnace set to 0
4/7/2010	5:32:01 PM	H2 valve closed
4/7/2010	5:32:01 PM	BCl3 valve closed
4/7/2010	5:32:01 PM	PH3 valve closed
4/7/2010	5:32:01 PM	SiCl4 pre valve closed
4/7/2010	5:32:01 PM	SiCl4 post valve closed
4/7/2010	5:32:01 PM	Main Vac valve closed
4/7/2010	5:32:01 PM	Bypass valve closed
4/7/2010	5:32:01 PM	Bubbler valve closed
4/7/2010	5:32:01 PM	Helium valve opened
4/7/2010	5:32:01 PM	Helium MFC set to  500.000000
4/7/2010	5:32:01 PM	H2 MFC set to  0.000000
4/7/2010	5:32:01 PM	BCl3 MFC set to  0.000000
4/7/2010	5:32:01 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:32:01 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:32:01 PM	Tube furnace set to 0
4/7/2010	5:33:23 PM	Helium valve closed
4/7/2010	5:33:23 PM	H2 valve closed
4/7/2010	5:33:23 PM	BCl3 valve closed
4/7/2010	5:33:23 PM	PH3 valve closed
4/7/2010	5:33:23 PM	SiCl4 pre valve closed
4/7/2010	5:33:23 PM	SiCl4 post valve closed
4/7/2010	5:33:23 PM	Main Vac valve closed
4/7/2010	5:33:23 PM	Bypass valve closed
4/7/2010	5:33:23 PM	Bubbler valve closed
4/7/2010	5:33:23 PM	Helium MFC set to  0.000000
4/7/2010	5:33:23 PM	H2 MFC set to  0.000000
4/7/2010	5:33:23 PM	BCl3 MFC set to  0.000000
4/7/2010	5:33:23 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:33:23 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:33:23 PM	Tube furnace set to 0
4/7/2010	5:33:38 PM	Helium valve closed
4/7/2010	5:33:38 PM	H2 valve closed
4/7/2010	5:33:38 PM	BCl3 valve closed
4/7/2010	5:33:38 PM	PH3 valve closed
4/7/2010	5:33:38 PM	SiCl4 pre valve closed
4/7/2010	5:33:38 PM	SiCl4 post valve closed
4/7/2010	5:33:38 PM	Main Vac valve closed
4/7/2010	5:33:38 PM	Bubbler valve closed
4/7/2010	5:33:38 PM	Bypass valve opened
4/7/2010	5:33:38 PM	Helium MFC set to  0.000000
4/7/2010	5:33:38 PM	H2 MFC set to  0.000000
4/7/2010	5:33:38 PM	BCl3 MFC set to  0.000000
4/7/2010	5:33:38 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:33:38 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:33:39 PM	Tube furnace set to 0
4/7/2010	5:34:06 PM	Helium valve closed
4/7/2010	5:34:06 PM	H2 valve closed
4/7/2010	5:34:06 PM	BCl3 valve closed
4/7/2010	5:34:06 PM	PH3 valve closed
4/7/2010	5:34:06 PM	SiCl4 pre valve closed
4/7/2010	5:34:06 PM	SiCl4 post valve closed
4/7/2010	5:34:06 PM	Bubbler valve closed
4/7/2010	5:34:06 PM	Main Vac valve opened
4/7/2010	5:34:06 PM	Bypass valve opened
4/7/2010	5:34:06 PM	Helium MFC set to  0.000000
4/7/2010	5:34:06 PM	H2 MFC set to  0.000000
4/7/2010	5:34:06 PM	BCl3 MFC set to  0.000000
4/7/2010	5:34:06 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:34:06 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:34:06 PM	Tube furnace set to 0
4/7/2010	5:39:06 PM	H2 valve closed
4/7/2010	5:39:06 PM	BCl3 valve closed
4/7/2010	5:39:06 PM	PH3 valve closed
4/7/2010	5:39:06 PM	SiCl4 pre valve closed
4/7/2010	5:39:06 PM	SiCl4 post valve closed
4/7/2010	5:39:06 PM	Main Vac valve closed
4/7/2010	5:39:06 PM	Bypass valve closed
4/7/2010	5:39:06 PM	Bubbler valve closed
4/7/2010	5:39:06 PM	Helium valve opened
4/7/2010	5:39:06 PM	Helium MFC set to  500.000000
4/7/2010	5:39:06 PM	H2 MFC set to  0.000000
4/7/2010	5:39:06 PM	BCl3 MFC set to  0.000000
4/7/2010	5:39:06 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:39:06 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:39:06 PM	Tube furnace set to 0
4/7/2010	5:40:29 PM	Helium valve closed
4/7/2010	5:40:29 PM	H2 valve closed
4/7/2010	5:40:29 PM	BCl3 valve closed
4/7/2010	5:40:29 PM	PH3 valve closed
4/7/2010	5:40:29 PM	SiCl4 pre valve closed
4/7/2010	5:40:29 PM	SiCl4 post valve closed
4/7/2010	5:40:29 PM	Main Vac valve closed
4/7/2010	5:40:29 PM	Bypass valve closed
4/7/2010	5:40:29 PM	Bubbler valve closed
4/7/2010	5:40:29 PM	Helium MFC set to  0.000000
4/7/2010	5:40:29 PM	H2 MFC set to  0.000000
4/7/2010	5:40:29 PM	BCl3 MFC set to  0.000000
4/7/2010	5:40:29 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:40:29 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:40:29 PM	Tube furnace set to 0
4/7/2010	5:40:44 PM	Helium valve closed
4/7/2010	5:40:44 PM	H2 valve closed
4/7/2010	5:40:44 PM	BCl3 valve closed
4/7/2010	5:40:44 PM	PH3 valve closed
4/7/2010	5:40:44 PM	SiCl4 pre valve closed
4/7/2010	5:40:44 PM	SiCl4 post valve closed
4/7/2010	5:40:44 PM	Main Vac valve closed
4/7/2010	5:40:44 PM	Bubbler valve closed
4/7/2010	5:40:44 PM	Bypass valve opened
4/7/2010	5:40:44 PM	Helium MFC set to  0.000000
4/7/2010	5:40:44 PM	H2 MFC set to  0.000000
4/7/2010	5:40:44 PM	BCl3 MFC set to  0.000000
4/7/2010	5:40:44 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:40:44 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:40:44 PM	Tube furnace set to 0
4/7/2010	5:41:11 PM	Helium valve closed
4/7/2010	5:41:11 PM	H2 valve closed
4/7/2010	5:41:11 PM	BCl3 valve closed
4/7/2010	5:41:11 PM	PH3 valve closed
4/7/2010	5:41:11 PM	SiCl4 pre valve closed
4/7/2010	5:41:11 PM	SiCl4 post valve closed
4/7/2010	5:41:11 PM	Bubbler valve closed
4/7/2010	5:41:11 PM	Main Vac valve opened
4/7/2010	5:41:11 PM	Bypass valve opened
4/7/2010	5:41:11 PM	Helium MFC set to  0.000000
4/7/2010	5:41:11 PM	H2 MFC set to  0.000000
4/7/2010	5:41:11 PM	BCl3 MFC set to  0.000000
4/7/2010	5:41:11 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:41:11 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:41:12 PM	Tube furnace set to 0
4/7/2010	5:46:12 PM	Helium valve closed
4/7/2010	5:46:12 PM	H2 valve closed
4/7/2010	5:46:12 PM	BCl3 valve closed
4/7/2010	5:46:12 PM	PH3 valve closed
4/7/2010	5:46:12 PM	SiCl4 pre valve closed
4/7/2010	5:46:12 PM	SiCl4 post valve closed
4/7/2010	5:46:12 PM	Bubbler valve closed
4/7/2010	5:46:12 PM	Main Vac valve opened
4/7/2010	5:46:12 PM	Bypass valve opened
4/7/2010	5:46:12 PM	Helium MFC set to  0.000000
4/7/2010	5:46:12 PM	H2 MFC set to  0.000000
4/7/2010	5:46:12 PM	BCl3 MFC set to  0.000000
4/7/2010	5:46:12 PM	SiCl4 MFC set to  0.000000
4/7/2010	5:46:12 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	5:46:12 PM	Tube furnace set to 0
4/7/2010	5:46:13 PM	Run finished at 5:46 PM
4/7/2010	5:46:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/7/2010	5:54:26 PM	Main Vac valve closed
4/7/2010	5:54:27 PM	Bypass valve closed
4/7/2010	5:54:33 PM	Bypass valve opened
4/7/2010	5:54:33 PM	Main Vac valve opened
4/7/2010	5:55:06 PM	Helium MFC set to  100.000000
4/7/2010	5:55:28 PM	Helium valve opened
4/7/2010	5:56:01 PM	Helium MFC set to  500.000000
4/7/2010	5:57:11 PM	SiCl4 MFC set to  500.000000
4/7/2010	5:57:14 PM	SiCl4 pre valve opened
4/7/2010	5:57:21 PM	SiCl4 pre valve closed
4/7/2010	5:59:00 PM	SiCl4 pre valve opened
4/7/2010	10:13:36 PM	Helium valve closed
4/7/2010	10:13:36 PM	SiCl4 pre valve closed
4/7/2010	10:14:18 PM	SiCl4 MFC set to  500.000000
4/7/2010	10:14:20 PM	SiCl4 pre valve opened
4/7/2010	10:14:23 PM	SiCl4 pre valve closed
4/7/2010	10:20:11 PM	SiCl4 MFC set to  10.000000
4/7/2010	10:20:20 PM	SiCl4 MFC set to  500.000000
4/7/2010	10:20:28 PM	SiCl4 pre valve opened
4/7/2010	10:22:51 PM	SiCl4 pre valve closed
4/7/2010	10:23:02 PM	SiCl4 post valve opened
4/7/2010	10:24:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:24:07 PM	Recipe started at 10:24 PM
4/7/2010	10:24:07 PM	H2 valve closed
4/7/2010	10:24:07 PM	BCl3 valve closed
4/7/2010	10:24:07 PM	PH3 valve closed
4/7/2010	10:24:07 PM	SiCl4 pre valve closed
4/7/2010	10:24:07 PM	SiCl4 post valve closed
4/7/2010	10:24:07 PM	Main Vac valve closed
4/7/2010	10:24:07 PM	Bypass valve closed
4/7/2010	10:24:07 PM	Bubbler valve closed
4/7/2010	10:24:07 PM	Helium valve opened
4/7/2010	10:24:07 PM	Helium MFC set to  500.000000
4/7/2010	10:24:07 PM	H2 MFC set to  0.000000
4/7/2010	10:24:07 PM	BCl3 MFC set to  0.000000
4/7/2010	10:24:07 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:24:07 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:24:07 PM	Tube furnace set to 0
4/7/2010	10:25:27 PM	Helium valve closed
4/7/2010	10:25:27 PM	H2 valve closed
4/7/2010	10:25:27 PM	BCl3 valve closed
4/7/2010	10:25:27 PM	PH3 valve closed
4/7/2010	10:25:27 PM	SiCl4 pre valve closed
4/7/2010	10:25:27 PM	SiCl4 post valve closed
4/7/2010	10:25:27 PM	Main Vac valve closed
4/7/2010	10:25:27 PM	Bypass valve closed
4/7/2010	10:25:27 PM	Bubbler valve closed
4/7/2010	10:25:27 PM	Helium MFC set to  0.000000
4/7/2010	10:25:27 PM	H2 MFC set to  0.000000
4/7/2010	10:25:27 PM	BCl3 MFC set to  0.000000
4/7/2010	10:25:27 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:25:27 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:25:28 PM	Tube furnace set to 0
4/7/2010	10:25:28 PM	Run finished at 10:25 PM
4/7/2010	10:25:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:27:32 PM	SiCl4 post valve opened
4/7/2010	10:27:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:27:41 PM	Recipe started at 10:27 PM
4/7/2010	10:27:41 PM	H2 valve closed
4/7/2010	10:27:41 PM	BCl3 valve closed
4/7/2010	10:27:41 PM	PH3 valve closed
4/7/2010	10:27:41 PM	SiCl4 pre valve closed
4/7/2010	10:27:41 PM	SiCl4 post valve closed
4/7/2010	10:27:41 PM	Main Vac valve closed
4/7/2010	10:27:41 PM	Bypass valve closed
4/7/2010	10:27:41 PM	Bubbler valve closed
4/7/2010	10:27:41 PM	Helium valve opened
4/7/2010	10:27:41 PM	Helium MFC set to  500.000000
4/7/2010	10:27:41 PM	H2 MFC set to  0.000000
4/7/2010	10:27:41 PM	BCl3 MFC set to  0.000000
4/7/2010	10:27:41 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:27:41 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:27:41 PM	Tube furnace set to 0
4/7/2010	10:27:42 PM	Helium valve closed
4/7/2010	10:27:42 PM	H2 valve closed
4/7/2010	10:27:42 PM	BCl3 valve closed
4/7/2010	10:27:42 PM	PH3 valve closed
4/7/2010	10:27:42 PM	SiCl4 pre valve closed
4/7/2010	10:27:42 PM	SiCl4 post valve closed
4/7/2010	10:27:42 PM	Main Vac valve closed
4/7/2010	10:27:42 PM	Bypass valve closed
4/7/2010	10:27:42 PM	Bubbler valve closed
4/7/2010	10:27:42 PM	Helium MFC set to  0.000000
4/7/2010	10:27:42 PM	H2 MFC set to  0.000000
4/7/2010	10:27:42 PM	BCl3 MFC set to  0.000000
4/7/2010	10:27:42 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:27:42 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:27:42 PM	Tube furnace set to 0
4/7/2010	10:27:42 PM	Run finished at 10:27 PM
4/7/2010	10:27:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:27:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:27:59 PM	Recipe started at 10:27 PM
4/7/2010	10:27:59 PM	H2 valve closed
4/7/2010	10:27:59 PM	BCl3 valve closed
4/7/2010	10:27:59 PM	PH3 valve closed
4/7/2010	10:27:59 PM	SiCl4 pre valve closed
4/7/2010	10:27:59 PM	SiCl4 post valve closed
4/7/2010	10:27:59 PM	Main Vac valve closed
4/7/2010	10:27:59 PM	Bypass valve closed
4/7/2010	10:28:00 PM	Bubbler valve closed
4/7/2010	10:28:00 PM	Helium valve opened
4/7/2010	10:28:00 PM	Helium MFC set to  500.000000
4/7/2010	10:28:00 PM	H2 MFC set to  0.000000
4/7/2010	10:28:00 PM	BCl3 MFC set to  0.000000
4/7/2010	10:28:00 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:28:00 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:28:00 PM	Tube furnace set to 0
4/7/2010	10:28:00 PM	Helium valve closed
4/7/2010	10:28:00 PM	H2 valve closed
4/7/2010	10:28:00 PM	BCl3 valve closed
4/7/2010	10:28:00 PM	PH3 valve closed
4/7/2010	10:28:00 PM	SiCl4 pre valve closed
4/7/2010	10:28:00 PM	SiCl4 post valve closed
4/7/2010	10:28:00 PM	Main Vac valve closed
4/7/2010	10:28:00 PM	Bypass valve closed
4/7/2010	10:28:00 PM	Bubbler valve closed
4/7/2010	10:28:00 PM	Helium MFC set to  0.000000
4/7/2010	10:28:00 PM	H2 MFC set to  0.000000
4/7/2010	10:28:00 PM	BCl3 MFC set to  0.000000
4/7/2010	10:28:00 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:28:00 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:28:00 PM	Tube furnace set to 0
4/7/2010	10:28:00 PM	Run finished at 10:28 PM
4/7/2010	10:28:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/7/2010	10:28:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/7/2010	10:28:01 PM	Recipe started at 10:28 PM
4/7/2010	10:28:01 PM	Helium valve closed
4/7/2010	10:28:01 PM	H2 valve closed
4/7/2010	10:28:01 PM	BCl3 valve closed
4/7/2010	10:28:01 PM	PH3 valve closed
4/7/2010	10:28:01 PM	SiCl4 pre valve closed
4/7/2010	10:28:01 PM	SiCl4 post valve closed
4/7/2010	10:28:01 PM	Main Vac valve closed
4/7/2010	10:28:01 PM	Bubbler valve closed
4/7/2010	10:28:01 PM	Bypass valve opened
4/7/2010	10:28:01 PM	Helium MFC set to  0.000000
4/7/2010	10:28:01 PM	H2 MFC set to  0.000000
4/7/2010	10:28:01 PM	BCl3 MFC set to  0.000000
4/7/2010	10:28:01 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:28:01 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:28:02 PM	Tube furnace set to 0
4/7/2010	10:28:29 PM	Helium valve closed
4/7/2010	10:28:29 PM	H2 valve closed
4/7/2010	10:28:29 PM	BCl3 valve closed
4/7/2010	10:28:29 PM	PH3 valve closed
4/7/2010	10:28:29 PM	SiCl4 pre valve closed
4/7/2010	10:28:29 PM	SiCl4 post valve closed
4/7/2010	10:28:29 PM	Bubbler valve closed
4/7/2010	10:28:29 PM	Main Vac valve opened
4/7/2010	10:28:29 PM	Bypass valve opened
4/7/2010	10:28:29 PM	Helium MFC set to  0.000000
4/7/2010	10:28:29 PM	H2 MFC set to  0.000000
4/7/2010	10:28:29 PM	BCl3 MFC set to  0.000000
4/7/2010	10:28:29 PM	SiCl4 MFC set to  0.000000
4/7/2010	10:28:29 PM	Bypass solenoid MFC set to  0.000000
4/7/2010	10:28:29 PM	Tube furnace set to 0
4/7/2010	10:28:29 PM	Run finished at 10:28 PM
4/7/2010	10:28:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
